Layout structure of standard cell, standard cell library, and layout structure of semiconductor integrated circuit
In a layout structure of a standard cell including off transistors 126, 127 unnecessary for logic operation of a circuit, dummy via contacts 116, 117 are disposed on impurity diffusion regions 103, 106 of the off transistors 126, 127 , respectively. Dummy metal interconnects 122, 123 are connected to the dummy via contacts 116, 117 , respectively. Thus, variations in the density of via contacts, which are one of causes lowering the production yield of semiconductor integrated circuits, is reduced, improving manufacturing defects of the via contacts.
1. A layout structure of a standard cell having a first transistor, a second transistor, and a third transistor which are connected to each other in series, the first transistor and the second transistor sharing a first impurity diffusion region, and the second transistor and the third transistor sharing a second impurity diffusion region, wherein
at least one dummy via contact is provided on and connected to any one of the first impurity diffusion region and the second impurity diffusion region.
2. The layout structure of the standard cell of claim 1 , wherein
the at least one dummy via contact is connected to a dummy metal interconnect.
3. The layout structure of the standard cell of claim 2 , wherein
the at least one dummy via contact includes a plurality of dummy via contacts in a dummy metal interconnect region.
4. The layout structure of the standard cell of claim 1 , wherein
the standard cell is a NAND circuit having three or more inputs, and
the first to third transistors are n-channel transistors.
5. The layout structure of the standard cell of claim 1 , wherein
the standard cell is a NOR circuit having three or more inputs, and
the first to third transistors are p-channel transistors.
6. The layout structure of the standard cell of claim 1 , wherein
the standard cell is an inverter circuit, and
the first to third transistors are n-channel transistors or p-channel transistors.
7. A layout structure of a semiconductor integrated circuit, comprising:
a standard cell having the layout structure of claim 1 , wherein
the standard cell is mounted on an LSI together with other standard cells.
8. A standard cell library comprising:
a standard cell having the layout structure of claim 1 .
9. A layout structure of a standard cell having a first transistor and a second transistor which are connected to each other in series, the first transistor and the second transistor sharing an impurity diffusion region, wherein
at least one dummy via contact is provided on and connected to the impurity diffusion region.
10. The layout structure of the standard cell of claim 9 , wherein
the standard cell is a NAND circuit having two or more inputs, and
the first transistor is an n-channel transistor.
11. The layout structure of the standard cell of claim 9 , wherein
the standard cell is a NOR circuit having two or more inputs, and
the first transistor is a p-channel transistor.
12. The layout structure of the standard cell of claim 9 , wherein
the standard cell is an inverter circuit, and
the first transistor is an n-channel transistor or a p-channel transistor.
13. A layout structure of a standard cell having a first transistor, a second transistor, and a third transistor which are connected to each other in series, the first transistor and the second transistor sharing a first impurity diffusion region, and the second transistor and the third transistor sharing a second impurity diffusion region, wherein
at least one dummy via contact is provided on and connected to at least one of the first impurity diffusion region and the second impurity diffusion region.
14. The layout structure of the standard cell of claim 13 , wherein
the at least one dummy via contact is covered with a dummy metal interconnect.
15. The layout structure of the standard cell of claim 13 , wherein
the standard cell is a NAND circuit having three or more inputs, and
the first to third transistors are n-channel transistors.
16. The layout structure of the standard cell of claim 13 , wherein
the standard cell is a NOR circuit having three or more inputs, and
the first to third transistors are p-channel transistors.
17. The layout structure of the standard cell of claim 13 , wherein
the standard cell is an inverter circuit, and
the first to third transistors are n-channel transistors or p-channel transistors.
18. The layout structure of the standard cell of claim 13 , wherein
the at least one dummy via contact includes a plurality of dummy via contacts in a dummy metal interconnect region.