MODIFIED BAND GAP WINDOW LAYER FOR A CIGS ABSORBER CONTAINING PHOTOVOLTAIC CELL AND METHOD OF MAKING THEREOF
A photovoltaic device includes a substrate, a first electrode layer over the substrate, a first compound semiconductor layer including copper, indium, gallium and selenium over the first electrode layer, a second compound semiconductor layer including copper, indium, and sulfur on the first compound semiconductor layer, and a second electrode layer over the second compound semiconductor layer.
1 . A method of making a photovoltaic device, comprising:
providing a substrate;
depositing a first electrode layer over the substrate;
sputter depositing a first compound semiconductor layer comprising copper, indium, gallium and selenium over the electrode layer;
sputter depositing a second compound semiconductor layer comprising copper, indium and sulfur over the first compound semiconductor layer; and
depositing a second electrode over the second compound semiconductor layer.
2 . The method of claim 1 , wherein the second compound semiconductor layer has a higher bandgap than the first compound semiconductor layer.
3 . The method of claim 1 , wherein the second compound semiconductor layer is sputter deposited form at least one sputtering target comprising sulfur, copper and indium.
4 . The method of claim 3 , wherein the sputter depositing at least one of the first compound semiconductor layer or the second compound semiconductor layer is conducted in a selenium containing ambient.
5 . The method of claim 1 , wherein the second compound semiconductor layer further comprises selenium.
6 . The method of claim 3 , wherein the sputtering target comprises a copper-indium alloy comprising one or more of CuS, Cu 2 S, Na 2 S, Na 2 SO 3 , GaS, In 2 S 3 , Se 2 S 6 , S 7 NH, or N 4 S 3 F 3 .
7 . The method of claim 3 , wherein the sputtering target comprises at alloy of copper, indium and sulfur or an alloy of copper, indium, selenium and sulfur.
8 . The method of claim 1 , wherein the second compound semiconductor layer comprises a plurality of compound semiconductor sublayers comprising copper, indium and sulfur, wherein a concentration of sulfur in each successive sublayer of the plurality the compound semiconductor sublayers is greater than in a preceding sublayer.
9 . The method of claim 8 , wherein sputter depositing a second compound semiconductor layer comprises sequentially passing the substrate past a plurality of targets wherein each successive target of the plurality of targets comprises more sulfur than a preceding target.
10 . The method of claim 8 , wherein the first compound semiconductor layer comprises copper indium gallium selenide and the second compound semiconductor layer comprises copper indium sulfide or copper indium sulfur selenide.
11 . The method of claim 3 , wherein a content of sulfur in the at least one target is 5-40 at % and a copper:indium ratio is 0.7-0.95 at %.
12 . The method of claim 1 , wherein the substrate comprises a web substrate.
13 . The method of claim 12 , further comprising:
moving the web though at least a first and a second sputtering chambers;
depositing the first compound semiconductor layer in the first chamber by reactive sputtering copper indium gallium selenide from one or more copper-indium-gallium alloy targets in a selenium containing ambient; and
depositing the second compound semiconductor layer in a second chamber by non-reactive sputtering from the at least one target comprising copper-indium-sulfur or copper-indium-sulfur-selenium.
14 . A photovoltaic device comprising:
a substrate;
a first electrode layer over the substrate;
a first compound semiconductor layer comprising copper, indium, gallium and selenium over the first electrode layer;
a second compound semiconductor layer comprising copper, indium, and sulfur on the first compound semiconductor layer; and
a second electrode layer over the second compound semiconductor layer.
15 . The device of claim 14 , wherein the second compound semiconductor layer has a higher bandgap than the first compound semiconductor layer.
16 . The device of claim 15 , wherein the first compound semiconductor layer comprises a p-type copper indium gallium selenide absorber layer.
17 . The device of claim 16 , wherein the second compound semiconductor layer comprises an n-type copper indium sulfide or n-type copper indium sulfur selenide layer.
18 . The device of claim 17 , wherein the second compound semiconductor layer comprises a plurality of compound semiconductor sublayers comprising copper, indium and sulfur, wherein a concentration of sulfur in each successive sublayer of the plurality the compound semiconductor sublayers is greater than in a preceding sublayer.
19 . The device of claim 14 , wherein the substrate comprises a flexible metal substrate, the first electrode comprises molybdenum, and the second electrode layer comprises a transparent conductive oxide.
20 . The device of claim 14 , wherein a content of sulfur in the second compound semiconductor layer is 5-40 at %, a content of chalcogen in the second compound semiconductor layer is about 50 at %, a content of metal in the second compound semiconductor layer is about 50% and a copper:indium ratio is 0.7-0.95 at %.