Manufacturing method of organic EL display
View Patent ↗Provided is a method of manufacturing an organic EL display which includes a substrate having a TFT therein and a plurality of organic EL elements disposed on the substrate, each of the organic EL elements having a first electrode disposed on the substrate, an organic layer disposed on the first electrode, and a second electrode disposed on the organic layer, the method including: providing the substrate having the TFT therein; forming the first electrode connected to the TFT on the substrate; forming the organic layer on the first electrode; detecting a foreign substance introduced in the organic layer; forming a groove which surrounds the foreign substance in the organic layer; and forming the second electrode on the organic layer, the second electrode being separated by the groove from a region surrounded by the groove.
1. A method of manufacturing an organic EL display which comprises a substrate having a TFT therein and a plurality of organic EL elements disposed on the substrate, each of the organic EL elements having a first electrode disposed on the substrate, an organic layer disposed on the first electrode, and a second electrode disposed on the organic layer, the method comprising:
providing the substrate having the TFT therein;
forming the first electrode connected to the TFT on the substrate;
forming the organic layer on the first electrode;
detecting a foreign substance introduced in the organic layer;
forming a groove which surrounds the foreign substance in the organic layer; and
forming the second electrode on the organic layer, the second electrode being separated by the groove from a region surrounded by the groove.
2. The manufacturing method according to claim 1 , wherein the depth of the groove is larger than the thickness of the second electrode.
3. The manufacturing method according to claim 1 , wherein the width of the groove is larger than the thickness of the second electrode.
4. The manufacturing method according to claim 1 , wherein wall surfaces of the groove are perpendicular to the substrate.
5. The manufacturing method according to claim 1 , wherein wall surfaces of the groove are inclined with respect to the substrate.
6. The manufacturing method according to claim 1 , wherein the groove has a reverse tapered shape.
7. The manufacturing method according to claim 1 , wherein the groove is formed by ablating a portion of the organic layer with laser radiation.
8. The manufacturing method according to claim 1 , wherein the second electrode is formed by vapor deposition or sputtering.