Vertical nitride semiconductor light emitting diode and method of manufacturing the same
View Patent ↗A vertical nitride-based semiconductor LED comprises a structure support layer; a p-electrode formed on the structure support layer; a p-type nitride semiconductor layer formed on the p-electrode; an active layer formed on the p-type nitride semiconductor layer; an n-type nitride semiconductor layer formed on the active layer; an n-electrode formed on a portion of the n-type nitride semiconductor layer; and a buffer layer formed on a region of the n-type nitride semiconductor layer on which the n-electrode is not formed, the buffer layer having irregularities formed thereon. The surface of the n-type nitride semiconductor layer coming in contact with the n-electrode is flat.
1. A method of manufacturing a vertical semiconductor LED, said method comprising:
sequentially forming a buffer layer, a first semiconductor layer, an active layer, and a second semiconductor layer on a substrate;
forming a second electrode on the second semiconductor layer;
forming a structure support layer on the second electrode;
removing the substrate through an LLO (Laser Lift-Off) process;
selectively etching a portion of the buffer layer, from which the substrate is removed, so as to expose a substantially flat portion of the first semiconductor layer;
forming irregularities by etching the unetched portion of the buffer layer; and
forming a first electrode on the exposed substantially flat portion of the first semiconductor layer.
2. The method according to claim 1 , wherein in the etching of the buffer layer to expose the substantially flat portion of the first semiconductor layer, a dry-etching process is used.
3. A method of manufacturing a vertical semiconductor LED, said method comprising:
sequentially forming a buffer layer, a first semiconductor layer, an active layer, and a second semiconductor layer on a substrate;
forming a second electrode on the second semiconductor layer;
forming a structure support layer on the second electrode;
removing the substrate through an LLO (Laser Lift-Off) process;
forming irregularities by etching the entire surface of the buffer layer, from which the substrate is removed;
selectively etching a portion of the buffer layer, on which the irregularities are formed, so as to expose a substantially flat portion of the first semiconductor layer; and
forming a first electrode on the exposed substantially flat portion of the first semiconductor layer.
4. The method according to claim 3 , wherein in the etching of the portion of the buffer layer, a dry-etching process is used.