Microphone with variable low frequency cutoff

1. A microphone system comprising:

a package having an interior and defining at least one input aperture for receiving an acoustic signal;

a MEMS microphone mounted within the interior of the package and mechanically coupled to at least a portion of one input aperture in the package, the microphone having a backvolume defined by the microphone and package; and

a MEMS valve coupled with at least one input aperture in the package, the valve having a valve opening generally circumscribed by a valve seat, the valve having an open mode for permitting acoustic signal access into the package interior through the valve opening, the valve also having a closed mode for substantially preventing acoustic signal access into the package interior through the valve opening,

the valve having a movable member configured to contact the valve seat when in the closed mode, the movable member being configured to move between the open mode and the closed mode in a direction that is generally perpendicular to the valve seat.

2. The microphone system as defined by claim 1 wherein the movable member substantially covers the valve opening when in the closed mode.

3. The microphone system as defined by claim 1 wherein the movable member is electrically conductive and electrostatically attracted toward and away from the valve seat.

4. The microphone system as defined by claim 1 wherein the valve comprises a serpentine spring that controls movement of the movable member between the closed mode in the open mode.

5. The microphone system as defined by claim 1 wherein the valve comprises a main surface forming the valve opening, the valve seat comprising a raised surface protruding from the main surface.

6. The microphone system as defined by claim 1 wherein the valve comprises a main surface forming the valve opening, the valve seat comprising a portion of the main surface.

7. The microphone system as defined by claim 1 wherein the valve has a fully open position, a fully closed position, and a plurality of intermediate positions between the fully open and fully closed positions, the valve being configured to stop the movable member at any one of the intermediate positions for a predetermined amount of time during use.

8. The microphone system as defined by claim 1 wherein the microphone and valve are mounted over the same input aperture.

9. The microphone system as defined by claim 1 wherein the microphone and valve are formed on a single die.

10. The microphone system as defined by claim 1 further comprising a noise detector coupled with the valve and configured to detect noise received by the microphone, the noise detector being configured to reduce noise sensitivity of the microphone after detecting noise.

11. The microphone system as defined by claim 1 wherein the valve comprises a flapper valve.

12. A microphone system comprising:

a package having an interior and defining at least one input aperture for receiving an acoustic signal, the package having an electromagnetic interference mitigation shield;

a MEMS microphone mounted within the interior of the package, the microphone having a backvolume defined by the microphone and package; and

a MEMS valve acoustically coupled with at least one input aperture in the package, the valve having a valve opening generally circumscribed by a valve seat, the valve having an open mode for permitting acoustic signal access into the package interior through the valve opening, the valve also having a closed mode for substantially preventing acoustic signal access into the package interior through the valve opening,

the valve having a movable member configured to contact the valve seat when in the closed mode, the movable member being configured to move between the open mode and the closed mode in a direction that is generally perpendicular to the valve seat.

13. The microphone system as defined by claim 12 wherein the movable member is generally constrained to move in a direction that is generally perpendicular to the valve seat only.

14. The microphone system as defined by claim 12 wherein the MEMS microphone and valve are formed on the same die and mechanically coupled with the same input aperture.

15. The microphone system as defined by claim 12 wherein the valve has a fully open position, a fully closed position, and a plurality of intermediate positions between the fully open and fully closed positions, the valve being configured to stop the movable member at any one of the intermediate positions for a predetermined amount of time during use.

16. A method of controlling a microphone, the method comprising:

providing a MEMS microphone system having a package forming an input aperture, the package also having an interior containing a microphone having a low frequency cutoff, the microphone and package forming a backvolume, the microphone system also having a MEMS valve with a valve seat and an opposed movable member;

moving the movable member of the valve generally perpendicularly toward or generally perpendicularly away from the valve seat to vary the fluid flow resistance into the backvolume to control the low frequency cutoff of the microphone; and

receiving an incident acoustic signal through the input aperture, the microphone responding to the incident acoustic signal as a function of the low frequency cutoff of the microphone as controlled by the valve.

17. The method as defined by claim 16 further comprising electromagnetically shielding the interior of the package.

18. The method as defined by claim 16 wherein the movable member directly contacts the valve seat when the valve is in a closed mode.

19. The method as defined by claim 16 further comprising detecting noise in an acoustic signal, and controlling the valve to move the movable member in response to the noise.

20. The method as defined by claim 16 further comprising:

manually selecting a mode of the valve; and

controlling the movable member to one of a plurality of modes in response to the manual selection.