Method of drawing a pattern for magnetic transfer
View Patent ↗A method of drawing a pattern for magnetic transfer on a substrate, including the steps of rotating the substrate and scanning the substrate, by an electron beam, in a circumferential direction thereof, deflecting, using a deflection signal, the electron beam in a radial direction thereof, and switching irradiation of the electron beam on and off, so as to create the pattern of a plurality of dots.
1. A method of drawing a pattern for magnetic transfer on a substrate, comprising:
rotating the substrate, and scanning the substrate, by an electron beam, in a circumferential direction thereof; and
deflecting, using a deflection signal, the electron beam in a radial direction thereof, and switching irradiation of the electron beam on and off, so as to create the pattern of a plurality of dots,
wherein the deflection signal is of a periodic saw-toothed waveform, and
if the method draws one track of the substrate by repeating the scanning n times, the deflection signal has a period of (2πB)/(nA), where A is a number of bits of the pattern in one round in the circumferential direction, and B is a number of bits of the pattern on a spiral trajectory when the spiral trajectory shifts by one track in the radial direction.
2. The method of claim 1 , wherein, if the method draws one track of the substrate with a track pitch Tp by repeating the scanning n times, the deflection signal has a maximum magnitude of Tp/n.
3. A method of drawing a pattern for magnetic transfer on a substrate, comprising:
rotating the substrate, and scanning the substrate, by an electron beam, in a circumferential direction thereof; and
deflecting, using a deflection signal, the electron beam in a radial direction thereof, and switching irradiation of the electron beam on and off, so as to create the pattern of a plurality of dots,
wherein the deflection signal is of a periodic saw-toothed waveform, and
the deflection signal has a period of (2πBR)/(nAL), where L is a constant linear velocity of the drawing, and R is a radial position of the scanning.
4. The method of claim 1 , wherein the pattern of the plurality of dots are arranged in a spiral configuration, corresponding to a reference servo signal in a spiral mode, to specify a radial position of a concentric track of the substrate.
5. The method of claim 3 , wherein, if the method draws one track of the substrate with a track pitch Tp by repeating the scanning n times, the deflection signal has a maximum magnitude of Tp/n.
6. The method of claim 3 , wherein the pattern of the plurality of dots are arranged in a spiral configuration, corresponding to a reference servo signal in a spiral mode, to specify a radial position of a concentric track of the substrate.