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App. No. 12/910,465 · Confirmation No. 8193

Production of Polycrystalline Silicon By The Thermal Decomposition of Trichlorosilane In A Fluidized Bed Reactor

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Quick Facts
App. No.
12/910,465
Filed
2010-10-22
Pub. No.
US20120100059A1
Art Unit
1736