Manufacture of n-type chalcogenide compositions and their uses in photovoltaic devices
View Patent ↗A layer of an n-type chalcogenide compositions including at least cadmium that is provided on a substrate in the presence of an oxidizing gas in an amount sufficient to provide a resistivity to the layer that is less than the resistivity a layer deposited under identical conditions but in the substantial absence of oxygen. Such n-type chalcogenide compositions are particularly useful in the making of photovoltaic devices.
1. A method of making an n-type chalcogenide composition within structure of a photovoltaic device comprising the steps of:
providing a substrate; and
forming an n-type chalcogenide composition comprising at least one sulfide and/or at least one selenide that incorporate at least cadmium on a surface of the substrate in an oxidizing atmosphere comprising an oxidizing gas and at least one other gas, wherein the oxidizing atmosphere has a pressure less than 100 mTorr and wherein the oxidizing gas comprises from 0.001 mol % to 0.7 mol % of the oxidizing atmosphere.
2. The method of claim 1 , wherein the oxidizing atmosphere comprises from about 0.05 mole % to about 0.7 mole % of the oxidizing gas at a pressure of less than about 100 mTorr.
3. The method of claim 1 , wherein the oxidizing atmosphere is at a pressure is in the range of from about 5 to about 20 mTorr.
4. The method of claim 1 , wherein the oxidizing atmosphere comprises from about 0.05 mole % to an about 0.3 mole % of the oxidizing gas.
5. The method of claim 1 , wherein the oxidizing atmosphere comprises less than about 0.25 mole % of the oxidizing gas.
6. The method of claim 1 , wherein the partial pressure of the oxidizing gas in the oxidizing atmosphere is less than about 0.5 mTorr.
7. The method of claim 6 , wherein the partial pressure of the oxidizing gas in the oxidizing atmosphere is less than about 0.3 mTorr.
8. The method of claim 1 , wherein the oxidizing gas is selected from oxygen, water vapor, nitrous oxide, and ozone.
9. The method of claim 1 , wherein the n-type chalcogenide composition further comprises one or more constituents selected from Zn, In, and combinations thereof.
10. The method of claim 1 , wherein the at least one other gas is selected from nitrogen, a noble gas and combinations thereof.
11. The method of claim 1 , wherein the oxidizing atmosphere comprises oxygen and a noble gas.
12. The method of claim 1 , wherein the n-type chalcogenide composition comprises cadmium and sulfur.
13. The method of claim 1 , wherein;
the substrate comprises a p-type photovoltaic composition; and
the n-type chalcogenide composition is in electrical contact with a surface of the p-type photovoltaic composition.
14. The method of claim 1 , wherein the n-type chalcogenide composition is formed by evaporation, sputtering, chemical vapor deposition, or atomic layer deposition.
15. The method of claim 1 , wherein the n-type chalcogenide composition is formed by sputtering.