Methods of sputtering cadmium sulfide layers for use in cadmium telluride based thin film photovoltaic devices
View Patent ↗Methods are generally provided of sputtering a cadmium sulfide layer on a substrate. The cadmium sulfide layer can be sputtered on a substrate from a target in a sputtering atmosphere, wherein the target comprises about 75% to about 100% by weight cadmium, and wherein the sputtering atmosphere comprises a sulfur-containing source gas. The cadmium sulfide layer can be used in methods of forming cadmium telluride thin film photovoltaic devices.
1. A method of manufacturing a cadmium telluride thin film photovoltaic device, the method comprising:
depositing a resistive transparent buffer layer on a transparent conductive oxide layer, wherein the transparent conductive oxide layer is on a substrate;
sputtering a cadmium sulfide layer to a thickness of about 10 nm to about 100 nm on the resistive transparent buffer layer from a target in a sputtering atmosphere, wherein the target comprises about 75% to about 100% by weight cadmium, and wherein the sputtering atmosphere comprises a sulfur-containing source gas and oxygen; and,
depositing a cadmium telluride layer on the cadmium sulfide layer.
2. The method as in claim 1 , wherein the target is substantially free from sulfur.
3. The method as in claim 1 , wherein the target consists essentially of cadmium.
4. The method as in claim 1 , wherein the sputtering atmosphere comprises the sulfur-containing source gas in an amount of about 25% to 95% by volume.
5. The method as in claim 1 , wherein the sulfur-containing source gas includes sulfur gas, hydrogen sulfide, carbon disulfide, sulfur hexafluoride, sulfur dichloride, alkane thiols, thioethers, or mixtures thereof.
6. The method as in claim 1 , wherein the sulfur-containing source gas is hydrogen sulfide.
7. The method as in claim 1 , wherein the cadmium sulfide layer is sputtered to the thickness of about 50 nm to about 80 nm.
8. The method as in claim 1 , wherein the sputtering atmosphere comprises oxygen gas in an oxygen amount of about 1% to about 25% by volume.
9. The method as in claim 1 , wherein the sputtering atmosphere comprises oxygen gas in an oxygen amount of about 5% to about 15% by volume.
10. The method as in claim 1 , wherein the sputtering atmosphere comprises the sulfur-containing source gas in an amount of about 50% to about 85% by volume.
11. The method as in claim 1 , wherein the target consists of cadmium.
12. The method as in claim 1 , wherein the sulfur-containing source gas is sulfur dichloride.
13. The method as in claim 1 , wherein the sputtering atmosphere is substantially free from halides.
14. The method as in claim 1 , wherein the sputtering atmosphere is substantially free from carbon.
15. The method as in claim 1 , wherein the sputtering atmosphere has a sputtering pressure of about 10 mTorr to about 150 mTorr.