Organic EL device
View Patent ↗According to one embodiment, a method of manufacturing an organic EL device includes providing a structure including a substrate and an electrode positioned above the substrate, and forming an organic layer including a mixture of first and second organic materials above the electrode. The first organic material has a first sublimation point. The second organic material has a second sublimation point higher than the first sublimation point. The formation of the organic layer includes heating an evaporation material including a mixture of the first and second organic materials to an evaporation temperature so as to sublimate the first and second organic materials, and delivering the sublimed first and second organic materials toward the electrode to deposit a mixture including the first and second organic materials above the electrode. The evaporation temperature is, for example, a temperature higher than the second sublimation temperature by 50° C. or more.
1. A method of manufacturing an organic EL device, comprising:
providing a structure including a substrate and an electrode positioned above the substrate; and
forming an organic layer including a mixture of first and second organic materials above the electrode, the first organic material having a first sublimation point SP 1 , the second organic material having a second sublimation point SP 2 higher than the first sublimation point SP 1 , and the formation of the organic layer comprising
heating an evaporation material including a mixture of the first and second organic materials to an evaporation temperature so as to sublimate the first and second organic materials, the evaporation temperature being one of first to third temperatures, the first temperature being a temperature higher than the second sublimation temperature SP 2 by 50° C. or more, the second temperature being equal to or higher than a sum of the first sublimation temperature SP 1 and a product of 150/370 and the first sublimation temperature SP 1 , and the third temperature being equal to or higher than a sum of the second sublimation temperature SP 2 and a product of 50/370 and the second sublimation temperature SP 2 , and
delivering the sublimed first and second organic materials toward the electrode to deposit a mixture including the first and second organic materials above the electrode.
2. The method according to claim 1 , wherein the evaporation material is in a form of particles.
3. The method according to claim 2 , wherein the heating of the evaporation material includes supplying the evaporation material into a heating chamber, and heating the evaporation material in the heating chamber to the evaporation temperature.
4. The method according to claim 3 , wherein the heating chamber is spaced apart from a space below the structure, and the delivery of the first and second organic materials toward the electrode includes supplying the sublimed first and second organic materials from the heating chamber to a nozzle, the nozzle being placed in the space and configured to eject the sublimed first and second organic materials toward the electrode.
5. The method according to claim 4 , wherein the structure, the heating chamber and the nozzle are arranged in a chamber.
6. The method according to claim 5 , herein the evaporation material is supplied into the heating chamber from above.
7. The method according to claim 3 , wherein a flow of gas from the heating chamber to the substrate is shut off during a period after starting the supplying of the evaporation material into the heating chamber and before the sublimation of the second organic material starts, and the sublimed first and second organic materials are supplied to the substrate after the sublimation of the second organic material in the heating chamber starts.
8. The method according to claim 3 , wherein the supplying of the evaporation material into the heating chamber includes:
supplying a first evaporation material into the heating chamber, the first evaporation material including the second organic material and optionally the first organic material; and
thereafter supplying a second evaporation material into the heating chamber, the second evaporation material including the first and second materials, the second evaporation material having a concentration of the first organic material higher than that of the first evaporation material.
9. The method according to claim 1 , wherein the evaporation temperature is the first temperature.
10. The method according to claim 1 , wherein the first organic material is a host material and the second organic material is a dopant.
11. The method according to claim 1 , wherein the evaporation material includes two or more dopants.
12. A method of manufacturing an organic EL device, comprising:
providing a structure including a substrate and an electrode positioned above the substrate; and
forming an organic layer including a mixture of first and second organic materials above the electrode, the first organic material having a first sublimation point SP 1 , the second organic material having a second sublimation point SP 2 higher than the first sublimation point SP 1 , and the formation of the organic layer comprising
supplying an evaporation material including a mixture of the first and second organic materials into a heating chamber,
heating the evaporation material in the heating chamber to sublimate the first and second organic materials,
keeping a flow of gas from the heating chamber toward the electrode shut off during a period after starting the supplying of the evaporation material into the heating chamber and before the sublimation of the second organic material starts, and
delivering the sublimed first and second organic materials toward the electrode after the sublimation of the second organic material in the heating chamber starts so as to deposit a mixture including the first and second organic materials above the electrode.
13. The method according to claim 12 , wherein the evaporation material is in a form of particles.
14. The method according to claim 13 , wherein the heating chamber is spaced apart from a space below the structure, and the delivery of the first and second organic materials toward the electrode includes supplying the sublimed first and second organic materials from the heating chamber to a nozzle, the nozzle being placed in the space and configured to eject the sublimed first and second organic materials toward the electrode.
15. The method according to claim 12 , wherein the structure, the heating chamber and the nozzle are arranged in a chamber.
16. The method according to claim 15 , herein the evaporation material is supplied into the heating chamber from above.
17. The method according to claim 12 , wherein the first organic material is a host material and the second organic material is a dopant.
18. The method according to claim 12 , wherein the evaporation material includes two or more dopants.
19. A method of manufacturing an organic EL device, comprising:
providing a structure including a substrate and an electrode positioned above the substrate; and
forming an organic layer including a mixture of first and second organic materials above the electrode, the first organic material having a first sublimation point SP 1 , the second organic material having a second sublimation point SP 2 higher than the first sublimation point SP 1 , and the formation of the organic layer comprising
supplying an evaporation material including a mixture of the first and second organic materials into a heating chamber,
heating the evaporation material in the heating chamber to sublimate the first and second organic materials, and
delivering the sublimed first and second organic materials toward the electrode so as to deposit a mixture including the first and second organic materials above the electrode,
wherein the supplying of the evaporation material into the heating chamber includes
supplying a first evaporation material into the heating chamber, the first evaporation material including the second organic material and optionally the first organic material, and
thereafter supplying a second evaporation material into the heating chamber, the second evaporation material including the first and second materials, the second evaporation material having a concentration of the first organic material higher than that of the first evaporation material.
20. The method according to claim 19 , wherein the first organic material is a host material and the second organic material is a dopant.