Interferometric surface inspection using a slit-shaped reference beam from inspection surface
View Patent ↗Provided are a surface inspection apparatus and method capable of detecting foreign materials on the surface of a substrate, and a slit coater having the surface inspection apparatus. In the surface inspection apparatus, a slit lighting unit irradiates slit-shaped light. An optical system splits the slit-shaped light into two beams traveling along two different paths, is incident upon a subject, and extracts an interference image caused by combination of the two beams reflected from the subject. An imaging device captures the interference image to output an image signal. An analysis unit acquires a luminance value of the image signal, analyzes the luminance value in real time, and determines whether or not foreign materials are present.
1. A surface inspection apparatus, comprising:
a slit lighting unit outputting slit-shaped light;
an optical system configured to split the slit-shaped light into two beams traveling along two different paths, direct the two beams onto a subject, and extract an interference image by combining the two beams reflected from the subject;
an imaging device configured to capture the interference image and to output an image signal in response thereto; and
an analysis unit configured to acquire a luminance value of the image signal, analyze the luminance value in real time, and determine whether or not foreign materials are present.
2. The surface inspection apparatus as claimed in claim 1 , wherein the optical system includes:
a splitter splitting the slit-shaped light into a first beam traveling along a first path and a second beam traveling along a second path;
a first objective lens in the first path; and
a reflective mirror, a piezo-electric transducer (PZT) unit, and a second objective lens in the second path.
3. The surface inspection apparatus as claimed in claim 2 , wherein the reflective mirror is between the splitter and the PZT unit, the reflective mirror directing the second beam towards the subject along the second path.
4. The surface inspection apparatus as claimed in claim 2 , wherein the PZT unit is configured to displace the second objective lens in a vertical direction relative to the subject.
5. The surface inspection apparatus as claimed in claim 4 , wherein the PZT unit is configured to align the second objective lens relative to the first objective lens to maximize constructive interference when no foreign materials are present.
6. The surface inspection apparatus as claimed in claim 2 , wherein the first and second objective lenses are identical.
7. The surface inspection apparatus as claimed in claim 2 , wherein the splitter combines the first and second beams reflected from the subject.
8. The surface inspection apparatus as claimed in claim 1 , wherein the imaging device includes a line scan camera.
9. A surface inspection method of inspecting presence of foreign materials on a subject, the method comprising:
splitting slit-shaped light irradiated from a slit lighting unit into a first beam traveling along a first path and a second beam traveling along a second path;
directing the first and second beams onto the subject,
combining the first and second beams reflected from the subject to cause interference;
capturing an image due to the interference and outputting an image signal; and
analyzing a luminance value of the image signal to determine whether or not foreign materials are present.
10. The surface inspection method as claimed in claim 9 , wherein providing the first beam onto the subject is through a first objective lens disposed in the first path and providing the second beam onto the subject is through a reflective mirror, a piezo-electric transducer (PZT) unit, and a second objective lens disposed in the second path.
11. The surface inspection method as claimed in claim 9 , wherein the first and second paths are configured to maximize constructive interference when the reflected first and second beams are combined and no foreign material is present.
12. The surface inspection method as claimed in claim 9 , wherein analyzing includes determining that no foreign materials are present when the luminance value is high and that foreign materials are present when the luminance value is low.
13. A slit coater, comprising:
a nozzle unit configured to apply a coating solution to a substrate; and
a surface inspection apparatus configured to inspect for a presence of foreign materials on the substrate and installed in front of the nozzle unit in a direction in which the coating solution is applied, the surface inspection apparatus including:
a slit lighting unit outputting slit-shaped light;
an optical system configured to split the slit-shaped light into two beams traveling along two different paths, direct the two beams onto a subject, and extract an interference image by combining the two beams reflected from the subject;
an imaging device configured to capture the interference image and to output an image signal in response thereto; and
an analysis unit configured to acquire a luminance value of the image signal, analyze the luminance value in real time, and determine whether or not foreign materials are present.
14. The slit coater as claimed in claim 13 , wherein the nozzle unit includes:
a slit unit configured to discharge the coating solution to the substrate; and
a nozzle support supporting the slit nozzle.
15. The slit coater as claimed in claim 13 , wherein the optical system includes:
a splitter splitting the slit-shaped light into a first beam traveling along a first path and a second beam traveling along a second path;
a first objective lens in the first path; and
a reflective mirror, a piezo-electric transducer (PZT) unit, and a second objective lens in the second path.
16. The slit coater as claimed in claim 15 , wherein the reflective mirror is between the splitter and the PZT unit, the reflective mirror directing the second beam towards the subject along the second path.
17. The slit coater as claimed in claim 15 , wherein the PZT unit is configured to displace the second objective lens in a vertical direction relative to the subject.
18. The slit coater as claimed in claim 17 , wherein the PZT unit is configured to align the second objective lens relative to the first objective lens to maximize constructive interference when no foreign materials are present.
19. The slit coater as claimed in claim 15 , wherein the first and second objective lenses are identical.
20. The slit coater as claimed in claim 15 , wherein the first and second paths are configured to maximize constructive interference when no foreign materials are present.
21. The slit coater as claimed in claim 15 , wherein the splitter combines the first and second beams reflected from the subject.
22. The slit coater as claimed in claim 13 , wherein the imaging device includes a line scan camera.