Optical image stabilizer and method of manufacturing the same
Disclosed herein is an optical image stabilizer, including: a substrate; a table disposed over the substrate, while levitating, to be movable on the substrate and having an image sensor mounted on the upper end of the substrate; cantilever arms disposed over the substrate, while levitating, and connected to the table to move the table; anchors fixing one ends of the cantilever arms onto the substrate; and electrodes applying voltage for moving the cantilever arm.
1. An optical image stabilizer, comprising:
a substrate;
a table disposed above the substrate, while levitating, to be movable above the substrate and having an image sensor mounted on the table;
one or more cantilever arms disposed above the substrate, while levitating, and connected to the table to horizontally move the table;
one or more anchors fixing one ends of the one or more cantilever arms to the substrate; and
one or more electrodes applying voltage to the respective one or more cantilever arms for horizontally moving the respective one or more cantilever arms without being in contact with the respective one or more cantilever arms and the table, wherein each electrode has a continuously curved surface facing a respective cantilever arm such that a distance between the electrode and the respective cantilever arm is larger at an end of the respective cantilever arm other than the one end fixed to the anchor.
2. The optical image stabilizer according to claim 1 , wherein the one or more electrodes include at least one pair of first and second electrodes corresponding to one side surface of the table and having a bilaterally symmetrical structure.
3. The optical image stabilizer according to claim 1 , wherein the cantilever arms are each disposed on two side surfaces based on an edge of the table.
4. The optical image stabilizer according to claim 3 , wherein the one ends of the cantilever arms each disposed on two side surfaces of the table are connected to one anchor disposed on the substrate corresponding to the edge of the table.
5. The optical image stabilizer according to claim 1 , wherein the one or more cantilever arms are formed to be integral with the table.
6. The optical image stabilizer according to claim 1 , wherein the one or more cantilever arms are made of silicon.
7. The optical image stabilizer according to claim 1 , wherein the table is made of silicon.
8. The optical image stabilizer according to claim 1 , wherein an insulator pattern is further provided between the one or more anchors and the substrate.
9. The optical image stabilizer according to claim 1 , further comprising stoppers disposed over the substrate corresponding to each edge of the table and limiting the movable region of the table.
10. The optical image stabilizer according to claim 9 , wherein an insulator pattern is further provided between the stoppers and the substrate.