Scratch resistant coated glass article including carbide layer(s) resistant to fluoride-based etchant(s)
View Patent ↗A scratch resistant coated article is provided which is also resistant to attacks by at least some fluoride-based etchant(s) for at least a period of time. In certain example embodiments, an anti-etch layer(s) is provided on a glass substrate in order to protect the glass substrate from attacks by fluoride-based etchant(s). In certain example embodiments, the anti-etch layer(s) is substantially transparent to visible light. In certain embodiments, a DLC layer(s) may be provided over the anti-etch layer. An underlayer may be provided under the anti-etch layer(s) in certain example embodiments. In certain example embodiments, the anti-etch layer(s) may be of or include a carbide and/or oxycarbide of Zr, Sn or the like.
1. A coated article comprising:
a glass substrate;
an anti-etch layer comprising zirconium oxycarbide and/or tin oxycarbide supported by the glass substrate, wherein the anti-etch layer is resistant to at least some fluoride-based glass etchants; and
a layer comprising diamond-like carbon (DLC) provided on the glass substrate over at least the anti-etch layer.
2. The coated article of claim 1 , wherein an interlayer comprising silicon oxide and/or silicon nitride is provided between the anti-etch layer and the glass substrate.
3. The coated article of claim 2 , wherein the interlayer comprising silicon oxide and/or silicon nitride is from about 100 to 400 Å thick.
4. The coated article of claim 1 , wherein the anti-etch layer is located directly on and contacting the glass substrate.
5. The coated article of claim 1 , wherein the coated article has a visible transmission of from about 10 to 90%.
6. The coated article of claim 1 , wherein the anti-etch layer is at least about 2,500 Å thick.
7. A coated article comprising:
a substrate; and
an anti-etch layer comprising zirconium oxycarbide and/or tin oxycarbide supported by the substrate, wherein the anti-etch layer is resistant to at least some fluoride-based glass etchants.
8. The coated article of claim 1 , wherein the anti-etch layer comprises hydrogenated zirconium oxycarbide and/or hydrogenated tin oxycarbide.
9. The coated article of claim 8 , wherein a hydrogen content of the layer comprising hydrogenated zirconium oxycarbide is from about 1-40%.
10. The coated article of claim 9 , wherein a hydrogen content of the layer comprising hydrogenated zirconium oxycarbide is from about 5-35%.
11. The coated article of claim 10 , wherein a hydrogen content of the layer comprising hydrogenated zirconium oxycarbide is from about 5-25%.
12. The coated article of claim 1 , wherein the coated article is a window.
13. The coated article of claim 1 , wherein the coated article has a visible transmission of at least about 50%.
14. The coated article of claim 1 , wherein the layer comprising DLC has a hardness of at least about 10 GPa.
15. The coated article of claim 14 , wherein the layer comprising DLC has a hardness of at least about 20 GPa.
16. The coated article of claim 1 , wherein the layer comprising DLC comprises highly tetrahedral amorphous carbon (t-aC).
17. The coated article of claim 16 , wherein the layer comprising highly tetrahedral amorphous carbon is hydrogenated.