Semiconductor device and method of manufacturing the same
View Patent ↗A semiconductor device includes a gate stack structure. The gate stack structure includes an interfacial layer formed on a semiconductor substrate, a high-k dielectric formed on the interfacial layer, a silicide gate including a diffusive material and an impurity metal, and formed over the high-k dielectric, and a barrier metal with a barrier effect to the diffusive material, and formed between the high-k dielectric and the metal gate. The impurity metal has a barrier effect to the diffusive material so that the diffusive material in the silicide gate can be prevented from being introduced into the high-k dielectric.
1. A semiconductor device including a gate stack structure, the gate stack structure comprising:
an interfacial layer formed on a semiconductor substrate;
a high-k dielectric formed on the interfacial layer;
a silicide gate including a diffusive material and an impurity metal, and formed over the high-k dielectric; and
a barrier metal with a barrier effect to the diffusive material, and formed between the high-k dielectric and the metal gate, wherein the impurity metal has a barrier effect to the diffusive material so that the diffusive material in the silicide gate can be prevented from being introduced into the high-k dielectric,
wherein said barrier metal comprises a titanium nitride (TiN) or a tantalum nitride (TaN).
2. The semiconductor device, as claimed in claim 1 , wherein the impurity material is locally located so that a peak of the concentration of the impurity metal is located at a boundary between the barrier metal and the silicide gate.
3. The semiconductor device, as claimed in claim 1 , wherein the high-k dielectric includes a Hf-based high-k dielectric or Zr-based high-k dielectric.
4. The semiconductor device, as claimed in claim 1 , wherein the barrier metal has a thickness of 3 nm or less.
5. The semiconductor device, as claimed in claim 4 , wherein the thickness of the barrier metal is 1.5 nm or less.
6. The semiconductor device, as claimed in claim 1 , wherein the diffusive material includes Ni.
7. The semiconductor device, as claimed in claim 1 , wherein the impurity metal comprises Pt or Al.
8. The semiconductor device, as claimed in claim 1 , wherein the impurity metal is locally located so that a peak of the concentration of the impurity metal is located at an upper portion of the barrier metal.
9. The semiconductor device, as claimed in claim 8 , further comprising an additional metal barrier layer comprising the impurity metal provided at the upper portion of the barrier metal.
10. The semiconductor device, as claimed in claim 1 , wherein the diffusive material comprises Pt.
11. The semiconductor device, as claimed in claim 1 , wherein the diffusive material comprises Co.