Back Contact Deposition Using Water-Doped Gas Mixtures
A method of manufacturing a photovoltaic module may include depositing a semiconductor material adjacent to a substrate; and depositing a back contact material adjacent to the semiconductor material, where depositing the back contact material may include directing a feed gas including hydrogen toward the substrate.
1 . A method of manufacturing a photovoltaic module, the method comprising:
depositing a semiconductor material adjacent to a substrate; and
depositing a contact material adjacent to the semiconductor material in the presence of a feed gas comprising hydrogen, oxygen or water toward the substrate.
2 . The method of claim 1 , wherein the contact material comprises a molybdenum nitride.
3 . The method of claim 1 , wherein the feed gas comprises argon gas.
4 . The method of claim 1 , wherein the feed gas comprises nitrogen gas.
5 . The method of claim 1 , wherein the feed gas comprises an argon-nitrogen gas mix.
6 . The method of claim 1 , wherein the feed gas comprises oxygen.
7 . The method of claim 1 , wherein the feed gas comprises water.
8 . The method of claim 1 , further comprising doping the feed gas with hydrogen.
9 . The method of claim 1 , further comprising doping the feed gas with oxygen.
10 . The method of claim 1 , further comprising doping the feed gas with water vapor.
11 . The method of claim 1 , wherein the step of depositing a back contact material comprises physical vapor deposition.
12 . The method of claim 1 , wherein the step of depositing a back contact material comprises chemical vapor deposition.
13 . The method of claim 1 , wherein the step of depositing a back contact material comprises laser ablation.
14 . The method of claim 1 , further comprising depositing a back support on the back contact material.
15 . A photovoltaic module comprising:
a cadmium telluride layer adjacent to a substrate; and
a molybdenum nitride back contact comprising at least a trace amount of hydrogen, oxygen, or water.