Organic light emitting display apparatus and method of manufacturing the same
An organic light emitting display apparatus and a method of manufacturing the organic light emitting display apparatus, whereby the manufacturing process is simplified and the electric characteristics of the organic light emitting display apparatus are improved. The organic light emitting display apparatus includes: a gate electrode that includes a first conductive layer including ITO, a second conductive layer on the first conductive layer, a third conductive layer on the second conductive layer and including ITO, and a fourth conductive layer on the third conductive layer and including IZO or AZO; and a pixel electrode formed in the same layer level as the gate electrode and including a first electrode layer that includes ITO, a second electrode layer on the first electrode layer, a third electrode layer on the second electrode layer and including ITO, and a fourth electrode layer on the third electrode layer and including IZO or AZO.
1. An organic light emitting display apparatus comprising:
a substrate;
an active layer on the substrate;
a gate electrode insulated from the active layer and composed of a first conductive layer comprising ITO, a second conductive layer on the first conductive layer, a third conductive layer on the second conductive layer and comprising ITO, and a fourth conductive layer on the third conductive layer and comprising IZO or AZO;
a pixel electrode formed in the same layer level as the gate electrode and composed of a first electrode layer comprising ITO, a second electrode layer on the first electrode layer, a third electrode layer on the second electrode layer and comprising ITO, and a fourth electrode layer on the third electrode layer and comprising IZO or AZO;
a source electrode and a drain electrode, the source and drain electrodes being insulated from the gate electrode and electrically coupled to the active layer;
an intermediate layer on the pixel electrode and comprising an organic light emitting layer; and
a counter electrode on the intermediate layer,
wherein the pixel electrode is electrically coupled to the source electrode or the drain electrode.
2. The organic light emitting display apparatus of claim 1 , wherein the third electrode layer comprises crystallized ITO.
3. The organic light emitting display apparatus of claim 1 , wherein the intermediate layer contacts the third electrode layer of the pixel electrode.
4. The organic light emitting display apparatus of claim 1 , wherein the source electrode or the drain electrode contacts the fourth electrode layer of the pixel electrode.
5. The organic light emitting display apparatus of claim 1 , wherein the fourth electrode layer of the pixel electrode comprises a first opening portion to expose the third electrode layer disposed below the fourth electrode layer.
6. The organic light emitting display apparatus of claim 5 , further comprising a planarization layer for insulating the gate electrode from the source electrode and the drain electrode,
wherein the source electrode and the drain electrode are on the planarization layer, and the planarization layer comprises a second opening portion corresponding to the first opening portion.
7. The organic light emitting display apparatus of claim 6 , further comprising a pixel define layer on the planarization layer, and covering the source electrode and the drain electrode, wherein the pixel define layer comprises a third opening portion contacting the first opening portion or formed in the first opening portion, and wherein the intermediate layer contacts the third electrode layer through the third opening portion.
8. The organic light emitting display apparatus of claim 1 , wherein the second conductive layer comprises Ag or Al.
9. The organic light emitting display apparatus of claim 1 , further comprising a capacitor comprising:
a capacitor first electrode layer formed in the same layer level as the active layer and physically separated from the active layer; and
a capacitor second electrode layer insulated from the capacitor first electrode layer and formed in the same layer level as the gate electrode to correspond to the capacitor first electrode layer.
10. The organic light emitting display apparatus of claim 9 , wherein the capacitor second electrode layer comprises a first layer comprising ITO, a second layer on the first layer, a third layer on the second layer and comprising ITO, and a fourth layer on the third layer and comprising IZO or AZO.
11. The organic light emitting display apparatus of claim 10 , wherein the second layer comprises Ag or Al.
12. A method of manufacturing an organic light emitting display apparatus, the method comprising:
forming an active layer on a substrate;
forming a gate electrode insulated from the active layer and composed of a first conductive layer comprising ITO, a second conductive layer on the first conductive layer, a third conductive layer on the second conductive layer and comprising ITO, and a fourth conductive layer on the third conductive layer and comprising IZO or AZO;
forming a pixel electrode in the same layer level as the gate electrode and composed of a first electrode layer comprising ITO, a second electrode layer on the first electrode layer, a third electrode layer on the second electrode layer and comprising ITO, and a fourth electrode layer on the third electrode layer and comprising IZO or AZO;
forming a source electrode and a drain electrode to be insulated from the gate electrode and electrically coupled to the active layer;
forming an intermediate layer on the pixel electrode and comprising an organic light emitting layer; and
forming a counter electrode on the intermediate layer,
wherein the pixel electrode is electrically coupled to the source electrode or the drain electrode.
13. The method of claim 12 , wherein the forming of the gate electrode and the forming of the pixel electrode are performed at the same time.
14. The method of claim 12 , wherein the forming of the pixel electrode comprises crystallizing the third electrode layer.
15. The method of claim 12 , wherein the intermediate layer is formed to contact the third electrode layer of the pixel electrode.
16. The method of claim 12 , wherein the source electrode or the drain electrode is formed to contact the fourth electrode layer of the pixel electrode.
17. The method of claim 12 , further comprising forming a first opening portion in the fourth electrode layer to expose the third electrode layer before the forming of the intermediate layer.
18. The method of claim 17 , further comprising forming a planarization layer on the gate electrode and the pixel electrode to insulate the gate electrode from the source electrode and the drain electrode, wherein the planarization layer comprises a second opening portion corresponding to the first opening portion.
19. The method of claim 18 , wherein the first opening portion is formed by removing the fourth electrode layer exposed through the second opening portion after forming the second opening portion.
20. The method of claim 18 , further comprising forming a pixel define layer on the planarization layer, covering the source electrode and the drain electrode, wherein the pixel define layer comprises a third opening portion contacting the first opening portion or formed in the first opening portion, and wherein the intermediate layer is formed to contact the third electrode layer through the third opening portion.
21. The method of claim 12 , further comprising:
forming a capacitor first electrode layer in the same layer level as the active layer and physically separated from the active layer; and
forming a capacitor second electrode layer to be insulated from the capacitor first electrode layer and to correspond to the capacitor first electrode layer and in the same layer level as the gate electrode.
22. The method of claim 21 , wherein the forming of the capacitor second electrode layer comprises forming a first layer comprising ITO, a second layer on the first layer, a third layer on the second layer and comprising ITO, and a fourth layer on the third layer and comprising IZO or AZO.
23. The method of claim 22 , wherein the second layer comprises Ag or Al.