Granted Patent B1

US 8,518,279 · App. 12/946,655 · Granted Aug 27, 2013

Abstract

Claims (22)

1. A method for providing a capping layer configured for an energy assisted magnetic recording (EAMR) head including at least one slider, the method comprising:

etching a substrate having a top surface using an etch to form a trench in the substrate, the trench having a first surface at a first angle from the top surface and a second surface having a second angle from the top surface, the first angle being a desired angle for alignment to the EAMR head;

providing a protective coating exposing the second surface and covering the first surface;

removing a portion of the substrate including the second surface to form a laser cavity within the substrate, the laser cavity configured to fit a laser device therein and being for the laser device; and

providing a reflective layer on the first surface to form a mirror, the cavity and mirror being configured for alignment of the laser to the laser cavity and to the mirror and for bonding the laser to the laser cavity.

2. The method of claim 1 further comprising:

exposing the top surface of the substrate before the step of etching the top surface, the top surface being at a particular angle from a predetermined crystallographic plane.

3. The method of claim 2 wherein the predetermined crystallographic plane is a [100] plane and wherein the particular angle is 9.7°.

4. The method of claim 1 wherein the etch is anisotropic and self-limiting.

5. The method of claim 4 wherein the etch has a first etch rate for a particular crystallographic plane set and at least a second etch rate not for the particular crystallographic plane set, the at least the second etch rate being greater than the first etch rate.

6. The method of claim 5 wherein the particular crystallographic plane set is a [111] plane set, wherein the first surface is a [-1-1-1] plane of the [111] plane set and wherein the second surface is a [111] plane of the [111] plane set.

7. The method of claim 1 wherein the step of providing the protective coating further includes:

depositing a protective coating layer covering at least the first surface and the second surface; and

ion milling the capping layer along a desired direction, the desired direction being within twenty degrees of the first surface.

8. The method of claim 7 wherein the desired direction is within ten degrees of the first surface.

9. The method of claim 1 wherein the step of removing the portion of the substrate further includes:

performing a reactive ion etch.

10. The method of claim 9 wherein the laser cavity has a re-entrant sidewall that meets the first surface at a standoff edge.

11. The method of claim 10 wherein the re-entrant sidewall forms a re-entrant angle with respect normal to the top surface of greater than zero degrees and not more than ten degrees.

12. The method of claim 11 wherein the re-entrant angle is at least one degree.

13. The method of claim 1 wherein the step of providing reflective layer is performed after the portion of the substrate is removed.

14. The method of claim 1 wherein the step of providing the reflective layer is performed before the step of providing the protective coating.

Assignments (9)