IP Library Granted Patent US 8,608,393
Granted Patent B2
US 8,608,393 · App. 12/946,657 · Granted Dec 17, 2013

Capillary actuator deployment

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Quick Facts
Patent No.
US 8,608,393
App. No.
12/946,657
Granted
Dec 17, 2013
Kind
B2
Abstract

A method for making an actuator includes forming a substantially planar actuator device of an electrically conductive material, the device incorporating an outer frame, a fixed frame attached to the outer frame, a moveable frame disposed parallel to the fixed frame, a motion control flexure coupling the moveable frame to the outer frame for coplanar, rectilinear movement relative to the outer frame and the fixed frame, an actuator incorporating a plurality of interdigitated teeth, a fixed portion of which is attached to the fixed frame and a moving portion of which is attached to the moveable frame, moving the moveable frame to a deployed position that is coplanar with, parallel to and spaced a selected distance apart from the fixed frame, and fixing the moveable frame at the deployed position for substantially rectilinear, perpendicular movement relative to the fixed frame.

Claims (60)

1. A method for making a device, the method comprising:

forming a substantially planar actuator, the actuator comprising:

an outer frame;

a fixed frame attached to the outer frame;

a moveable frame disposed parallel to the fixed frame;

a motion control flexure coupling the moveable frame to the outer frame for coplanar, rectilinear movement relative to the outer frame and the fixed frame;

an element coupled to the moveable frame for coplanar, rectilinear movement relative to the fixed and outer frames and coplanar, rotational movement about a central axis of the element and,

moving the moveable frame to a deployed position that is coplanar with, parallel to and spaced apart from the fixed frame at a selected distance.

2. The method of claim 1 , further comprising fixing the moveable frame at the deployed position for substantially rectilinear, movement relative to the fixed frame.

3. The method of claim 1 , wherein the moving comprises:

forming a moving plate having an upper portion coupled to the outer frame by an attachment spring, a lower end coupled to the motion control flexure, a side wall disposed adjacent to and spaced apart from a side wall of the outer frame, a pair of arms extending toward and defining a gap between the adjacent side walls of the moving plate and the outer frame, and a pair of registration locks disposed in the gap;

forming a pair of parallel slots and a pair of parallel registration keys in the adjacent side wall of the outer frame, each slot being configured to receive a respective one of the arms of the moving plate and each registration key being configured to engage in a respective one of the registration locks thereof;

forming a serpentine reservoir for a liquid adhesive in the outer frame and in communication with the gap between the adjacent side walls of the moving plate and the outer frame; and,

disposing a liquid adhesive in the gap between the adjacent side walls of the moving plate and the outer frame such that the adhesive is wicked into the serpentine reservoir in the outer plate and creates a capillary force between the adjacent side walls of the moving plate and the outer frame that draws the adjacent side wall of the moving plate laterally toward the adjacent side wall of the outer frame, thereby causing the respective arms, slots, registration locks and keys of the moving plate and the outer frame to move into engagement with each other and the motion control flexure to urge the moveable frame to the deployed position.

4. The method of claim 3 , further comprising curing the liquid adhesive such that the moveable frame is fixed in the deployed position.

5. The method of claim 1 , wherein the moving comprises:

forming a moving plate coupled to the motion control flexure by a deployment flexure and having a side wall disposed adjacent to a side wall of the outer frame, the adjacent side walls of the moving plate and the outer frame respectively containing complementary zigzag patterns defining a zigzag gap between the adjacent side walls of the moving plate and the outer frame;

disposing a liquid adhesive in the zigzag gap such that the liquid adhesive creates a capillary force between the adjacent side walls of the moving plate and the outer frame that draws the moving plate and the deployment flexure laterally toward the outer plate, thereby causing the motion control flexure to urge the moveable frame to the deployed position; and,

curing the liquid adhesive to fix the moveable frame in the deployed position.

6. The method of claim 1 , wherein the moving comprises:

forming a plurality of moving plates respectively interleaved between a corresponding plurality of stationary plates attached to the outer frame and defining a corresponding plurality of gaps between respective outer sidewalls of the moving plates and respective inner sidewalls of the stationary plates, a penultimately innermost one of the moving plates having an L-shaped arm overarching an innermost one of the stationary plates and extending downwardly and adjacent to an upper end of an inner side wall of an innermost one of the moving plates;

coupling an outermost one of the moving plates to an outermost one of the stationary plates with an attachment spring;

coupling adjacent ones of the moving plates intermediate the outermost and innermost ones of the stationary plates to each other with attachment springs;

coupling the innermost one of the moving plates to the motion control flexure with a deployment flexure; and,

disposing a liquid adhesive in the gaps such that the liquid adhesive creates a capillary force between the adjacent side walls of the moving plates and the stationary plates that draws the moving plates and the deployment flexure laterally, thereby causing the motion control flexure to urge the moveable frame to the deployed position.

7. The method of claim 6 , wherein the disposing comprises disposing the liquid adhesive in the gaps sequentially, beginning with an outermost one of the gaps and proceeding inwardly.

8. The method of claim 6 , further comprising curing the liquid adhesive such that the moveable frame is fixed in the deployed position.

9. The method of claim 1 , wherein:

an outer end of the motion control flexure is coupled to the outer frame by a plurality of attachment springs coupled to each other and to the motion control flexure at a nexus,

an inner end of the motion control flexures is coupled to the moving frame, and wherein moving the moveable frame to the deployed position comprises:

forming a moving plate rotatably attached to a stationary plate by a hinge at a lower end thereof and defining an angular gap between adjacent sidewalls of the moving plate and the stationary plate;

forming a connection beam coupling the moving plate to the nexus; and,

disposing a liquid adhesive in the angular gap such that the liquid adhesive creates a capillary force between the adjacent side walls of the moving plate and the stationary plate that rotates the moving plate and connection beam laterally about the hinge and toward the stationary plate, thereby causing the motion control flexure to urge the moveable frame to the deployed position.

10. The method of claim 9 , further comprising curing the liquid adhesive such that the moveable frame is locked in the deployed position.

11. The method of claim 1 , wherein the moving comprises:

forming a moving plate rotatably attached to a stationary plate by a hinge at a lower end thereof and defining an angular gap between adjacent sidewalls of the moving plate and the stationary plate;

coupling an inner end of the moving plate to the moveable frame with a deployment flexure; and,

disposing a liquid adhesive in the angular gap such that the liquid adhesive creates a capillary force between the adjacent side walls of the moving plate and the stationary plate that rotates the moving plate and deployment flexure laterally about the hinge and toward the stationary plate, thereby causing the moveable frame to move to the deployed position.

12. The method of claim 11 , further comprising curing the liquid adhesive such that the moveable frame is fixed in the deployed position.

13. An actuator made in accordance with the method of claim 1 , wherein the actuator comprises a plurality of interdigitated teeth, a fixed portion of which is attached to the fixed frame and a moving portion of which is attached to the moveable frame.

14. The method of claim 1 , wherein the device is an electronic device.

15. The method of claim 1 , wherein the device is a camera.

16. A device, comprising a substantially planar actuator, the actuator device comprising:

an outer frame;

a fixed frame attached to the outer frame;

a moveable frame disposed parallel to the fixed frame;

a motion control flexure coupling the moveable frame to the outer frame for coplanar, rectilinear movement relative to the outer frame and the fixed frame;

an element coupled to the moveable frame for coplanar, rectilinear movement relative to the fixed and outer frames and coplanar, rotational movement about a central axis of the element and,

wherein the moveable frame is fixed at a deployed position that is coplanar with, parallel to and spaced a selected distance apart from the fixed frame for substantially perpendicular movement relative thereto.

17. The device of claim 16 , further comprising:

a moving plate having an upper portion coupled to the outer frame by an attachment spring, a lower end coupled to the motion control flexure, a side wall disposed adjacent to and spaced apart from a side wall of the outer frame, a pair of aims extending toward and defining a gap between the adjacent side walls of the moving plate and the outer frame, and a pair of registration locks disposed in the gap;

a pair of parallel slots and a pair of parallel registration keys disposed in the adjacent side wall of the outer frame, each slot being configured to receive a respective one of the arms of the moving plate and each registration key being configured to engage in a respective one of the registration locks thereof;

a serpentine reservoir for a liquid adhesive formed in the outer frame and disposed in communication with the gap between the adjacent side walls of the moving plate and the outer frame; and,

an adhesive disposed in the gap between the adjacent side walls of the moving plate and the outer frame and fixing the moveable frame in the deployed position.

18. The device of claim 16 , further comprising:

a moving plate coupled to the motion control flexure by a deployment flexure and having a side wall disposed adjacent to a side wall of the outer frame, the adjacent side walls of the moving plate and the outer frame respectively containing complementary zigzag patterns defining a zigzag gap between the adjacent side walls of the moving plate and the outer frame; and,

an adhesive disposed in the zigzag gap and fixing the moveable frame in the deployed position.

19. The device of claim 16 , wherein the actuator device is formed of an electrically conductive material, wherein the actuator comprises a plurality of interdigitated teeth, a fixed portion of which is attached to the fixed frame and a moving portion of which is attached to the moveable frame.

20. The device of claim 16 , wherein the device is an electronic device.

21. The device of claim 16 , wherein the device is a camera.

Assignments (5)
SECURITY INTEREST Recorded May 3, 2023
From: ADEIA GUIDES INC.; ADEIA IMAGING LLC; ADEIA MEDIA HOLDINGS LLC; ADEIA MEDIA SOLUTIONS INC.; ADEIA SEMICONDUCTOR ADVANCED TECHNOLOGIES INC.; ADEIA SEMICONDUCTOR BONDING TECHNOLOGIES INC.; ADEIA SEMICONDUCTOR INC.; ADEIA SEMICONDUCTOR SOLUTIONS LLC; ADEIA SEMICONDUCTOR TECHNOLOGIES LLC; ADEIA SOLUTIONS LLC
To: BANK OF AMERICA, N.A., AS COLLATERAL AGENT
Reel/Frame 063529/0272 →
RELEASE OF SECURITY INTEREST Recorded Jun 11, 2020
From: ROYAL BANK OF CANADA
To: TESSERA, INC.; INVENSAS BONDING TECHNOLOGIES, INC. (F/K/A ZIPTRONIX, INC.); FOTONATION CORPORATION (F/K/A DIGITALOPTICS CORPORATION AND F/K/A DIGITALOPTICS CORPORATION MEMS); INVENSAS CORPORATION; TESSERA ADVANCED TECHNOLOGIES, INC; DTS, INC.; DTS LLC; PHORUS, INC.; IBIQUITY DIGITAL CORPORATION
Reel/Frame 052920/0001 →
SECURITY INTEREST Recorded Dec 2, 2016
From: INVENSAS CORPORATION; TESSERA, INC.; TESSERA ADVANCED TECHNOLOGIES, INC.; ZIPTRONIX, INC.; DIGITALOPTICS CORPORATION; DIGITALOPTICS CORPORATION MEMS; DTS, LLC; DTS, INC.; PHORUS, INC.; IBIQUITY DIGITAL CORPORATION
To: ROYAL BANK OF CANADA, AS COLLATERAL AGENT
Reel/Frame 040797/0001 →
CHANGE OF NAME Recorded Aug 23, 2011
From: TESSERA MEMS TECHNOLOGIES, INC.
To: DIGITALOPTICS CORPORATION MEMS
Reel/Frame 026795/0302 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 16, 2010
From: GUTIERREZ, ROMAN C.; CALVET, ROBERT J.; LIU, XIAOLEI
To: TESSERA MEMS TECHNOLOGIES, INC.
Reel/Frame 025379/0426 →