Etching composition for etching a transparent electrode
View Patent ↗An etchant composition for etching a transparent electrode is provided, the etchant composition includes an inorganic acid, an ammonium (NH 4 + )-containing compound, a cyclic amine compound, and the remaining amount of water.
1. A method of etching a transparent electrode layer comprising:
forming the transparent electrode layer on a substrate;
forming a photo resist pattern on the transparent electrode layer; and
etching the transparent electrode layer by using an etchant,
wherein the etchant comprises an inorganic acid, an ammonium (NH 4 + )-containing compound, a cyclic amine compound, and water,
wherein the inorganic acid comprises H 2 SO 4 and another inorganic acid, and a concentration of H 2 SO 4 is less than half of a concentration of the another inorganic acid.
2. The method of claim 1 , wherein
a concentration of the inorganic acid is from 1 to 20 wt % of the entire etchant composition, a concentration of the ammonium containing compound is from 0.1 to 5.0 wt % of the entire etchant composition, and a concentration of the cyclic amine compound is from 0.1 to 5.0 wt % of the entire etchant composition.
3. The method of claim 2 , wherein
the cyclic amine compound comprises at least one of aminotetrazole, benzotriazole, imidazole, indol, phulin, pyrazolel, pyridine, pyrimidine, pyrrol, pyrrolidine, and pyrroline.
4. The method of claim 3 , wherein
the ammonium (NH 4 + )-containing compound comprises at least one of CH 3 COONH 4 , NH 4 SO 3 NH 2 , NH 4 C 6 H 5 O 2 , NH 4 COONH 4 , NH 4 Cl, NH 4 H 2 PO 4 , NH 4 OOCH, NH 4 HCO 3 , H 4 NO 2 CCH 2 C(OH)(CO 2 NH 4 )CH 2 CO 2 NH 4 , NH 4 PF 6 , HOC(CO 2 H)(CH 2 CO 2 NH 4 ) 2 , NH 4 NO 3 , (NH 4 ) 2 S 2 O 8 , H 2 NSO 3 NH 4 , and (NH 4 ) 2 SO 4 .
5. The method of claim 4 , wherein
the transparent electrode layer comprises indium zinc oxide (IZO) or indium tin oxide (ITO).
6. The method of claim 1 , wherein
the etchant composition further comprises at least one of a surfactant, a metal ion sequestering agent, and a corrosion inhibitor.
7. The method of claim 1 , further comprising forming an element for a liquid crystal display on the substrate.
8. The method of claim 1 , wherein the concentration of the inorganic acid is from 7 to 20 wt % of the etchant composition, the concentration of the ammonium containing compound is from 0.1 to 5.0 wt % of the etchant composition, and the concentration of the cyclic amine compound is from 0.1 to 5.0 wt % of the etchant composition.