Method of manufacturing organic light emitting display apparatus, surface treatment device for organic light emitting display apparatus, and organic light emitting display apparatus

1. A method of manufacturing an organic light emitting display apparatus, the method comprising:

forming a first electrode on a substrate;

forming on the first electrode a pixel defining layer having first openings that expose predetermined portions of the first electrode;

forming a charge carrying layer on the pixel defining layer and the first electrode exposed through the first openings;

hydrophobically treating first portions of the surface of the charge carrying layer selectively with a laser and a reaction gas, wherein the first portions do not correspond to the openings;

forming organic emissive layers on the charge carrying layer, and

forming a second electrode so as to be electrically connected with the organic emissive layers.

2. The method of claim 1 , wherein the organic emissive layers are formed on the charge carrying layer to correspond to the first openings.

3. The method of claim 1 , wherein the charge carrying layer comprises at least one of a hole transport layer and a hole injection layer.

4. The method of claim 1 , wherein the reaction gas is a fluoride compound gas.

5. The method of claim 4 , wherein the fluoride compound gas comprises CF 4 .

6. The method of claim 1 , wherein the step of hydrophobically treating first portions of the surface of the charge carrying layer comprises irradiating a laser beam generated by an ultraviolet laser source onto the charge carrying layer, wherein the laser beam is integrated through a diffractive optical element (DOE) lens, a collimating lens, and a projection lens.

7. The method of claim 6 , wherein, in the step of hydrophobically treating first portions of the surface of the charge carrying layer, a guide mirror is used to guide the laser beam in a desired direction.

8. The method of claim 1 , wherein the step of hydrophobically treating first portions of the surface of the charge carrying layer comprises irradiating a laser beam generated by an optical system having an ultraviolet laser source onto the charge carrying layer through a polygon mirror.

9. The method of claim 8 , wherein the step of hydrophobically treating first portions of the surface of the charge carrying layer is performed in such a way that the polygon mirror rotates while the laser beam is continuously generated by the optical system.

10. The method of claim 8 , wherein the step of hydrophobically treating first portions of the surface of the charge carrying layer is performed in such a way that the laser beam is scanned in the form of a strip from an end of the substrate to the other end of the substrate as the polygon mirror rotates.

11. The method of claim 8 , wherein the step of hydrophobically treating first portions of the surface of the charge carrying layer comprises scanning the laser beam in the form of a strip from an end of the substrate to the other end of the substrate, and then moving the substrate or the optical system and polygon mirror in a direction perpendicular to the direction of the strip.

12. The method of claim 11 , wherein the substrate is moved in a direction perpendicular to the direction of the strip using a stage.

13. An organic light emitting display apparatus manufactured using the method according claim 11 .

14. The method of claim 1 , wherein the forming of the organic emissive layers is performed using a nozzle printing method.

15. An organic light emitting display apparatus manufactured using the method according claim 1 .