Thin-film capacitor with internally hollow through holes
View Patent ↗A thin-film capacitor that is less prone to generation of internal cracking or peeling is provided. In a thin-film capacitor according to the present embodiment, because through holes H are formed in internal electrodes containing Ni as a principal component in a lamination direction, a surface area of at least some of the through holes H is in the range of 0.19 μm 2 to 7.0 μm 2 , and a ratio of a surface area of the through holes H to a surface area of an entire main surface of the internal electrodes is in the range of 0.05% to 5%, peeling or cracking is suppressed from occurring at the boundaries between the internal electrodes and dielectric layers, and as a result, the yield is enhanced.
1. A thin-film capacitor comprising:
a base electrode;
two or more dielectric layers laminated on the base electrode; and
an electrode containing Ni as a principal component and laminated between the dielectric layers, wherein
the electrode has through holes that run in a lamination direction,
a surface area of at least some of the through holes is in a range of 0.19 μm 2 to 7.0 μm 2 ,
a ratio of the surface area of the through holes to a surface area of an entire main surface of the electrode in which the through holes are formed is in a range of 0.05% to 5%, and
the through holes are internally hollow and both ends of the through holes are covered with the dielectric layers.
2. The thin-film capacitor according to claim 1 , wherein the surface areas of all the through holes are in the range of 0.19 μm 2 to 7.0 μm 2 .