Method for performing burn-in test
View Patent ↗Provided is a method for performing a burn-in test on an object under test in which a plurality of electrodes are provided in positions at different heights. The method comprising steps of: preparing an object under test in which an electrode in a higher position have a higher surface roughness among the plurality of electrodes; bringing a plurality of sheet-type probes into contact with the plurality of electrodes, respectively; and supplying an electric current with the plurality of electrodes through the plurality of sheet-type probes. By implementing the method, the sheet-type probes can be kept in stable contact with the electrodes because electrodes in a higher position have a higher surface roughness Ra than electrodes in a lower position. Consequently, stable and reliable burn-in test can be performed.
1. A method for performing a burn-in test on an object under test in which a plurality of electrodes are provided in positions at different heights, the method comprising steps of:
preparing an object under test in which an electrode in a higher position have a higher surface roughness among the plurality of electrodes;
bringing a plurality of sheet-type probes into contact with the plurality of electrodes, respectively; and supplying an electric current with the plurality of electrodes through the plurality of sheet-type probes,
wherein the object under test includes a plurality of units provided on a wafer or a bar, each of the units including: an element having a predetermined height; and a lower electrode electrically connected to a lower surface of the element, and wherein the object under test is prepared in such a manner that a surface roughness of an upper electrode on the upper surface of the element is higher than a surface roughness of the lower electrode.
2. The method for performing a burn-in test as claimed in claim 1 , wherein the object under test is prepared by grinding a surface of a substrate of the element to a predetermined surface roughness, the surface being on a side on which the upper electrode is to be formed, then forming the upper electrode on the surface and thus providing a predetermined surface roughness to a surface of the upper electrode.
3. A method for performing a burn-in test on a unit bar to be divided into chips, each of the chips being configured to be used as a light source unit for thermally-assisted magnetic recording, the light source unit including a laser diode provided in a unit substrate, the method comprising steps of:
preparing a unit bar in such a manner that an upper electrode on an upper surface of the laser diode has a surface roughness higher than a lower electrode electrically connected to a lower surface of the laser diode;
bringing a sheet-type probe for the upper electrode and a sheet-type probe for the lower electrode into contact with the upper electrode and the lower electrode, respectively; and
supplying an electric current to the laser diode through the sheet-type probe for the upper electrode and the upper electrode and through the sheet-type probe for the lower electrode and the lower electrode.
4. The method for performing a burn-in test as claimed in claim 3 , wherein the unit bar is prepared in such a manner that a height of the laser diode is 40micrometers or more and is 100 micrometers or less.
5. The method for performing a burn-in test as claimed in claim 3 , wherein the unit bar is prepared in such a manner that the surface roughness Ra of the upper electrode is 0.5 micrometer or more and is 10 micrometers or less, and a surface roughness Ra of the lower electrode is 0.005 micrometer or more and is 0.5 micrometer or less.
6. The method for performing a burn-in test as claimed in claim 3 , wherein the unit bar is prepared by grinding a surface of a substrate of the laser diode to a predetermined surface roughness, the surface being on a side on which the upper electrode is to be formed, then forming the upper electrode on the surface and thus providing a predetermined surface roughness to a surface of the upper electrode.
7. The method for performing a burn-in test as claimed in claim 3 , wherein the sheet-type probes for the upper electrode and the lower electrode comprise a base element, an insulating layer formed on the base element, and a conductive layer formed on the insulating layer, and the conductive layer protrudes from the base element on a side on which the conductive layer contacts the lower electrode or the upper electrode.
8. The method for performing a burn-in test as claimed in claim 7 , wherein at least a portion of the conductive layer on a side on which the conductive layer contacts the lower electrode or the upper electrode is covered with gold or a gold alloy.
9. The method for performing a burn-in test as claimed in claim 3 , wherein the laser diode is supplied with an electric current, then measuring changes over time in electric current supplied to the laser diode required for obtaining a predetermined light output from the laser diode.
10. A test apparatus configured to implement the method for performing a burn-in test as claimed in claim 4 , the test apparatus comprising:
a holding jig for holding the unit bar;
a sheet-type probe set including sheet-type probes for upper electrodes and sheet-type probes for lower electrodes, one sheet-type probe for the upper electrode and one sheet-type probe for the lower electrode being arranged alternately, the upper electrode being provided on the laser diode and having a surface roughness higher than the lower electrode;
a photodetector held by the holding jig, the photodetector receiving laser light emitted from the laser diode supplied with an electric current through the sheet-type probe set, and measuring light output of the laser diode; and
a controller receiving a measurement output from the photodetector and controlling and measuring an electric current supplied to the laser diode.
11. The test apparatus as claimed in claim 10 , wherein a height of the laser diode is 40 micrometers or more and is 100 micrometers or less.
12. The test apparatus as claimed in claim 10 , wherein the surface roughness Ra of the upper electrode is 0.5 micrometer or more and is 10 micrometers or less, and a surface roughness Ra of the lower electrode is 0.005 micrometer or more and is 0.5micrometer or less.
13. The test apparatus as claimed in claim 10 , wherein the sheet-type probes for the upper electrode and the lower electrode comprise a base element, an insulating layer formed on the base element, and a conductive layer formed on the insulating layer, and the conductive layer protrudes from the base element on a side on which the conductive layer contacts the lower electrode or the upper electrode.
14. The test apparatus as claimed in claim 13 , wherein at least a portion of the conductive layer on a side on which the conductive layer contacts the lower electrode or the upper electrode is covered with gold or a gold alloy.