Electrostatic capacitance-type input device and method of manufacturing thereof
View Patent ↗An electrostatic capacitance-type input device includes: a first translucent conductive film that configures a first electrode that extends in a first direction in an input area on a substrate and second electrodes that extend in a second direction intersecting the first direction in the input area and are disconnected in intersection portions with the first electrode; an interlayer insulating film that is formed at least in areas overlapping the intersection portions; and a second translucent conductive film that configures relay electrodes formed on the interlayer insulating film to have sheet resistance lower than that of the first translucent conductive film and electrically connecting the second electrodes disconnected in the intersection portion by being electrically connected to the second electrodes in an area in which the interlayer insulating film is not formed and a peripheral wiring extending in a peripheral area of the substrate located to the outer side of the input area.
1. An electrostatic capacitance-type input device comprising:
a first translucent conductive film that configures a first electrode that extends in a first direction in an input area on a substrate and second electrodes that extend in a second direction intersecting the first direction in the input area and are disconnected in intersection portions with the first electrode;
an interlayer insulating film that is formed at least in areas overlapping the intersection portions; and
a second translucent conductive film that is formed on the interlayer insulating film and that has a sheet resistance lower than that of the first translucent conductive film, the second translucent conductive film configuring: relay electrodes that electrically connect the second electrodes disconnected in the intersection portion by electrically connecting the second electrodes in an area in which the interlayer insulating film is not formed; and a peripheral wiring extending in a peripheral area of the substrate located to an outer side of the input area,
wherein the first translucent conductive film configures an auxiliary wiring that extends so as to overlap the peripheral wiring and is electrically connected to the peripheral wiring in parallel.
2. The electrostatic capacitance-type input device according to claim 1 , wherein the interlayer insulating film is formed in an area overlapping the first electrode and in areas overlapping the second electrodes.
3. The electrostatic capacitance-type input device according to claim 2 , wherein the interlayer insulating film is formed between layers of the peripheral wiring and the auxiliary wiring.
4. The electrostatic capacitance-type input device according to claim 2 , wherein the second translucent conductive film is a translucent conductive film in which an ITO layer, a silver-based metal layer, and an ITO layer are stacked.
5. The electrostatic capacitance-type input device according to claim 1 , wherein in the input area the interlayer insulating film is formed exclusively in areas of the input area that overlap the intersection portions.
6. The electrostatic capacitance-type input device according to claim 1 , wherein the second translucent conductive film can be etched by an etching material that has etching selectivity for the first translucent conductive film.
7. The electrostatic capacitance-type input device according to claim 1 , wherein the second translucent conductive film is a translucent conductive film in which an IZO layer, a silver-based metal layer, and an IZO layer are stacked.