Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using thin film deposition apparatus

1. A method of manufacturing an organic light-emitting device comprising first and second electrodes formed on a substrate, facing each other, and an organic layer disposed between the first and second electrodes, the method comprising:

disposing the substrate in a chamber;

positioning a mask so as to face a surface of the substrate;

depositing the organic layer on the substrate, through the mask;

removing static electricity generated between the mask and the substrate; and

separating the mask and the substrate,

wherein the removing of the static electricity comprises supplying a current to the mask, and

wherein the supplying of the current to the mask comprises alternately supplying the current to the mask for a first predetermined time and not supplying the current to the mask for a second predetermined amount of time.

2. The method of claim 1 , wherein the current is supplied to the mask at a predetermined frequency.

3. The method of claim 1 , wherein the current is supplied to the mask, through a closed circuit formed between the mask, a power source to supply the current to the mask, and a resistor to adjust an amount of the current.

4. The method of claim 1 , wherein the current is supplied to the mask for a predetermined amount of time.