Gap fill integration
Novel gap fill schemes involving depositing both flowable oxide films and high density plasma chemical vapor deposition oxide (HDP oxide) films are provided. According to various embodiments, the flowable oxide films may be used as a sacrificial layer and/or as a material for bottom up gap fill. In certain embodiments, the top surface of the filled gap is an HDP oxide film. The resulting filled gap may be filled only with HDP oxide film or a combination of HDP oxide and flowable oxide films. The methods provide improved top hat reduction and avoid clipping of the structures defining the gaps.
1. A method of filling an unfilled gap on a semiconductor substrate, the method comprising:
depositing a flowable dielectric film in the gap to partially fill the gap;
after partially filling the gap with the flowable dielectric film, depositing a high density plasma chemical vapor deposition (HDP-CVD) dielectric film via a high density plasma chemical vapor deposition reaction in the gap to complete fill of the gap, wherein the flowable dielectric film is uncured prior to the subsequent HDP-CVD deposition, wherein the flowable dielectric film is at least partially densified during deposition of the HDP-CVD dielectric film, wherein depositing a flowable dielectric film in the gap comprises introducing a process gas comprising a silicon-containing precursor, an oxidant and a solvent, wherein the process gas is characterized as having an oxidant: silicon-containing precursor partial pressure ratio of about 5 to 15.
2. The method of claim 1 , wherein the flowable dielectric film is a silicon oxide film, a silicon nitride film or a silicon oxynitride film.
3. A method of filling an unfilled gap on a semiconductor substrate, the method comprising:
depositing a flowable dielectric film in the gap to partially fill the gap;
after partially filling the gap with the flowable dielectric film, depositing a high density plasma chemical vapor deposition (HDP-CVD) dielectric film via a high density plasma chemical vapor deposition reaction in the gap to complete fill of the gap, wherein the flowable dielectric film is uncured prior to the subsequent HDP-CVD deposition, wherein the flowable dielectric film is at least partially densified during deposition of the HDP-CVD dielectric film, wherein depositing a flowable dielectric film in the gap comprises introducing a process gas comprising a silicon-containing precursor, an oxidant and a solvent, wherein the process gas is characterized as having a solvent:oxidant partial pressure ratio of about 0.1-5.
4. The method of claim 1 , wherein flowable dielectric film is at least partially oxidized during deposition of the HDP-CVD dielectric film.
5. A method of filling an unfilled gap on a substrate, the method comprising:
introducing a process gas comprising a silicon-containing precursor, an oxidant and an optional solvent to thereby deposit a flowable film in the gap to partially fill the gap, wherein the process gas is characterized by the following partial pressure (Pp):vapor pressure (Pvp) ratios:
silicon-containing precursor: 0.01-1;
oxidant: 0.25-2; and
if present, solvent: 0.1-1;
after partially filling the gap with the flowable oxide film, depositing a high density plasma (HDP) dielectric film to complete fill of the gap.
6. The method of claim 5 , wherein the Pp:Pvp ratio of the silicon-containing precursor is between 0.01 and 0.5.
7. The method of claim 5 , wherein the Pp:Pvp ratio of the oxidant is between 0.5 and 1.
8. The method of claim 5 , wherein the Pp:Pvp ratio of the oxidant is between 0.1 and 1.
9. The method of claim 5 , wherein the process gas is further characterized as having an oxidant:silicon-containing precursor partial pressure ratio of about 5 to 15.
10. The method of claim 5 , wherein the process gas is further characterized as having a solvent:oxidant partial pressure ratio of about 0.1-5.
11. The method of claim 1 , further comprising oxidizing the flowable dielectric film in the gap.
12. The method of claim 3 , further comprising oxidizing the flowable dielectric film in the gap.
13. The method of claim 3 , wherein the flowable dielectric film is a silicon oxide film, a silicon nitride film or a silicon oxynitride film.
14. The method of claim 5 , further comprising transferring the substrate from a deposition module to a high density plasma chemical vapor deposition (HDP-CVD) module.
15. The method of claim 5 , further comprising partially densifying the flowable dielectric film.
16. The method of claim 6 , wherein partially densifying the flowable dielectric film comprises exposing the film to a remote or direct plasma.
17. The method of claim 7 , wherein the plasma is an oxidizing plasma.
18. The method of claim 7 , wherein the plasma is an oxidizing plasma.
19. The method of claim 5 , wherein the flowable film is a silicon oxide film, a silicon nitride film or a silicon oxynitride film.
20. The method of claim 5 , wherein the flowable film is a nitrogen-containing film.
21. The method of claim 5 , further comprising oxidizing the flowable film in the gap.
22. The method of claim 21 , wherein oxidizing the flowable film comprises one of: exposing the film to an oxidant in the presence of ultraviolet light and exposing the film to a remotely-generated oxidizing plasma.
23. The method of claim 21 , wherein oxidizing the flowable dielectric film comprises exposing the film to a direct (in situ) plasma.