High fidelity doping paste and methods thereof

1. A dopant paste consisting of:

a solvent;

a set of non-glass matrix particles dispersed into the solvent;

10-19 wt % of a dopant, and

optionally a binder,

wherein the set of non-glass matrix particles is a set of ceramic particles selected from the group consisting of Al 2 O 3 , MgO, CeO 2 , TiO 2 , ZnO, ZrO 2 , ZrO 2-3 , and Y 2 O 3 ,

wherein the dopant is selected from the group consisting of phosphorous dopant, arsenic dopant, antimony dopant, boron dopant and gallium dopant.

2. The dopant paste of claim 1 , wherein the solvent is an organic solvent with boiling point greater than about 200° C.

3. The dopant paste of claim 1 , wherein the solvent is selected from the group consisting of a solvent with a linear or cyclic structure, a solvent with saturated or unsaturated hydrocarbon parts, a hydrocarbon-based solvent, an alcohol, a thiol, an ether, an ester, an aldehyde, a ketone, and combinations thereof.

4. The dopant paste of claim 1 the binder is present in the paste.

5. The dopant paste of claim 4 , wherein the binder is a polymer soluble in the organic solvent.

6. The dopant paste of claim 4 , wherein the binder is one of a polyacrylate, a polyacetal, a polyvinyl, a cellulose, and copolymers thereof.

7. The dopant paste of claim 1 , wherein the dopant is one of an n-type dopant precursor and a p-type dopant precursor.

8. The dopant paste of claim 7 , wherein the n-type dopant precursor is one of an n-type liquid, an n-type solid, and an n-type polymer.

9. The dopant paste of claim 8 , where in n-type liquid is one of H 3 PO 4 and organophosphate.

10. The dopant paste of claim 8 , wherein n-type solid is one of P 2 O 5 , Na 3 PO 4 , AlPO 4 , AlP, and Na 3 P.

11. The dopant paste of claim 8 , wherein n-type polymer is one of a polyphosphonate and a polyphosphazenes.

12. The dopant paste of claim 7 , wherein the p-type dopant precursor is one of a p-type liquid, a p-type solid, a p-type binary compound, and a p-type polymer.

13. The dopant paste of claim 12 , wherein the p-type liquid is B(OR) 3 .

14. The dopant paste of claim 12 , wherein the p-type solid is one of B(OH) 3 , NaBO 2 , Na 2 B 4 O 7 , and B 2 O 3 .

15. The dopant paste of claim 12 , wherein the p-type binary compound is one of boronitride, boron carbide, boron silicides and elementary boron.

16. The dopant paste of claim 12 , wherein the p-type polymer is one of a polyborazole, and a organoboron-silicon.

17. The doping paste of claim 1 , wherein the average diameter of the set of the non-glass matrix particles is less than 25 microns.

18. The doping paste of claim 1 , wherein the set of non-glass matrix particles is a set of ceramic particles selected from the group consisting of TiO 2 and ZrO 2 .

19. A doping method comprising:

depositing the paste of claim 1 on a surface of a semiconductor substrate.

20. The doping method of claim 19 , wherein the semiconductor substrate is a silicon substrate.