Method of fabricating flat panel display having pad electrode
View Patent ↗A flat panel display, and method of fabricating the same, including a substrate having a display portion and a pad that is arranged on the substrate and is electrically coupled with the display portion. The pad includes a pad electrode arranged on the substrate, a passivation layer arranged on the pad electrode and having only one contact hole that exposes the pad electrode, and a transparent electrode arranged on the passivation layer and the pad electrode. The passivation layer may alternatively have a plurality of contact holes that expose the pad electrode. In this case, the reflective layer pattern is arranged on the passivation layer and the pad electrode, and it exposes portions of the pad electrode in the contact holes. Furthermore, the transparent electrode would be arranged on the reflective layer pattern and the exposed portions of the pad electrode.
1. A method of fabricating a flat panel display comprising a substrate having a display portion and a pad arranged on the substrate and electrically coupled with the display portion, the method comprising:
forming a pad electrode on the substrate;
forming a passivation layer on the pad electrode;
forming one contact hole in the passivation layer to expose the pad electrode;
forming a reflective layer on the resultant structure;
removing the entire reflective layer disposed in the contact hole; and
forming a transparent electrode on the resultant structure.
2. The method of claim 1 , wherein the pad electrode comprises one of molybdenum and molybdenum tungsten.
3. The method of claim 1 , further comprising forming an undercut at an edge of the contact hole.
4. The method of claim 1 , wherein the passivation layer comprises at least one layer selected from the group consisting of a silicon oxide layer, a silicon nitride layer, and a silicon oxynitride layer.
5. The method of claim 1 , wherein the display is one of an organic light emitting display and a liquid crystal display.
6. A method of fabricating a flat panel display comprising a substrate having a display portion and a pad arranged on the substrate and electrically coupled with the display portion, the method comprising:
forming a pad electrode on the substrate;
forming a passivation layer on the pad electrode;
forming a plurality of contact holes in the passivation layer to expose the pad electrode;
forming a reflective layer on the resultant structure;
removing portions of the reflective layer such that the pad electrode is exposed in the contact holes and the reflective layer overlaps a portion of the pad electrode in the contact holes; and
forming a transparent electrode on the resultant structure.
7. The method of claim 6 , wherein the pad electrode comprises one of molybdenum and molybdenum tungsten.
8. The method of claim 6 , wherein the passivation layer comprises at least one layer selected from the group consisting of a silicon oxide layer, a silicon nitride layer, and a silicon oxynitride layer.
9. The method of claim 6 , wherein the reflective layer comprises one of aluminum and an aluminum alloy.
10. The method of claim 6 , wherein the display is one of an organic light emitting display and a liquid crystal display.
11. The method of claim 3 , wherein the undercut is formed by removing a portion of the pad electrode.
12. The method of claim 1 , wherein the transparent electrode contacts the pad electrode and the passivation layer.
13. The method of claim 6 , wherein the transparent electrode contacts the pad electrode and the reflective layer.