Laser pattern mask and method for fabricating the same
View Patent ↗The present invention relates to a laser pattern mask, and a method for fabricating the same, which can prevent a laser pattern mask from being damaged by coating a protective film on a surface of a laser pattern mask for patterning an entire layer on a mother substrate at a time by laser ablation. The laser pattern mask includes a base substrate, a laser shielding pattern formed of a non-transparent metal on the base substrate to define laser pass through regions, and a protective film formed on an entire surface of the base substrate including the laser shielding pattern.
1. A laser pattern mask comprising;
a base substrate;
a laser shielding pattern formed of an opaque metal on the base substrate to define laser beam pass through regions; and
a protective film formed on an entire surface of the base substrate including the laser shielding pattern;
wherein the laser shielding pattern is formed of Ag and the protective film is formed of SiO 2 ,
wherein an entire layer on a mother substrate is patterned at a time by applying a laser beam to the laser pattern mask, and
wherein the protective film formed on the laser beam pass through regions is flush with the protective film formed on the laser shielding pattern.
2. A method for fabricating a laser pattern mask comprising the steps of:
forming a laser shielding pattern of an opaque metal on a base substrate to define laser beam pass through regions; and
forming a protective film on an entire surface of the base substrate including the laser shielding pattern;
wherein the laser shielding pattern is formed of Ag and the protective film is formed of SiO 2 ,
wherein an entire layer on a mother substrate is patterned at a time by applying a laser beam to the laser pattern mask, and
wherein the protective film formed on the laser beam pass through regions is flush with the protective film formed on the laser shielding pattern.
3. The method as claimed in claim 2 , wherein the step of forming a laser shielding pattern includes the steps of
forming a laser shielding layer on the base substrate and coating photoresist on the laser shielding layer;
subjecting the photoresist to exposure and development to form a photoresist pattern to have the laser beam pass through regions;
removing residual photoresist from the laser beam pass through the regions;
patterning the laser shielding layer by using the photoresist pattern to form the laser shielding pattern; and
removing the photoresist pattern.
4. The method as claimed in claim 3 , wherein the step of removing the residual photoresist from the laser beam pass through regions includes the step of using ashing or dry etching.
5. The method as claimed in claim 3 , wherein the step of forming the laser shielding layer includes the step of using wet etching.
6. The method as claimed in claim 2 , wherein the step of forming a protective film includes the step of using one process selected from Chemical Vapor Deposition (CVD), sputtering, and E-Beam.