Laser beam irradiation apparatus for substrate sealing, substrate sealing method, and method of manufacturing organic light emitting display device using the same
View Patent ↗A laser beam irradiation apparatus and method of manufacturing an organic light emitting display device using the same are disclosed. The laser beam irradiation apparatus is configured to irradiate a laser beam to an object extending in a first direction while moving the laser beam relative to the object in the first direction, where the laser beam has a cross-section taken in a plane perpendicular to a second direction in which the laser beam is irradiated from the apparatus, the cross-section comprising two substantially symmetrical portions that are substantially symmetrical about a centerline of the cross-section extending in the first direction, where the cross-section has a centerline length taken in the centerline, where at least part of the substantially symmetrical portions has a length in the first direction that is longer than the centerline length.
1. A laser beam irradiation apparatus comprising:
a beam scanner comprising:
a laser reflector configured to irradiate a laser beam in an irradiation direction to an object, and
a driver configured to move the laser reflector relative to the object in a first direction,
wherein the irradiated laser beam has a substantially uniform intensity across a cross-section taken in a plane perpendicular to the irradiation direction and parallel to the first direction, the cross-section of the irradiated laser beam comprising two substantially symmetrical portions that are substantially symmetrical about a centerline of the cross-section of the irradiated laser beam, wherein the cross-section has a centerline length along the centerline in the first direction, wherein each of the two substantially symmetrical portions has a maximum length in the first direction that is longer than the centerline length.
2. The laser beam irradiation apparatus of claim 1 , wherein the laser reflector is configured to irradiate the laser beam in the form of a spot beam.
3. The laser beam irradiation apparatus of claim 1 , wherein each of the substantially symmetrical portions of the cross section includes a first section and a second section about the part with the maximum length, wherein lengths of the first section measured in the first direction gradually increases as measuring away from the centerline toward the part with the maximum length, and wherein lengths of the second section measured in the first direction gradually decrease as measured away from the centerline and away from the part with the maximum length.
4. The laser beam irradiation apparatus of claim 1 , wherein the object is a frit, used for sealing two opposing glass substrates.