Semiconductor device and fabrication method therefor
View Patent ↗There is provided a semiconductor device including bit lines ( 14 ) formed in a semiconductor substrate ( 10 ), insulating film lines ( 18 ) located on the bit lines ( 14 ) to successively run in a length direction of the bit lines ( 14 ), gate electrodes ( 16 ) located above the semiconductor substrate ( 10 ) between the bit lines ( 14 ), and word lines ( 20 ) located on the gate electrodes ( 18 ) to run in a width direction of the bit lines ( 14 ), a trench region ( 22 ) formed between the bit lines ( 14 ) and the between word lines ( 20 ) in the semiconductor substrate, and there is also provided a fabrication method therefor. According to the present invention, it is possible to provide a semiconductor device where elements can be isolated between the word lines ( 14 ) and memory cells can be miniaturized, and to provide a fabrication method therefor.
1. A method of fabricating a semiconductor device comprising: forming bit lines in a semiconductor substrate; forming insulating film lines on the bit lines to successively run in a length direction of the bit lines; forming gate electrodes above the semiconductor substrate between the bit lines; forming word lines on the gate electrodes to run in a width direction of the bit lines; forming a trench region between the bit lines and between the word lines in the semiconductor substrate wherein forming the trench region includes etching the semiconductor substrate by using at least the insulating film lines as an etching mask; and forming an insulating film layer on the trench region; forming the bit lines includes implanting ions in the semiconductor substrate having openings formed in a first metal layer, of which the gate electrodes are to be composed; and wherein forming the insulating film lines includes forming a layer of the insulating film lines on the openings and on the first metal layer, and polishing the layer of the insulating film lines to the first metal layer.
2. The method as claimed in claim 1 , wherein forming the insulating film lines includes forming a silicon oxide film by CVD.
3. The method as claimed in claim 1 , further comprising forming a barrier layer that includes a silicon oxide film on the trench region, wherein forming the insulating film layer includes forming a silicon nitride film on the barrier layer.
4. The method as claimed in claim 1 , further comprising forming contact holes connected to the bit lines in the insulating film lines located between the insulating film layers.
5. The method as claimed in claim 1 , further comprising forming a channel-cut region having an opposite type impurity to those of the bit lines, in the semiconductor substrate in the trench region.
6. The method as claimed in claim 5 , wherein forming the channel-cut region includes implanting ions in the trench region by using the insulating film lines as a mask.
7. The method as claimed in claim 5 , further comprising forming sidewalls on sides of the trench region, wherein forming the channel-cut region includes implanting ions in the trench region by using the insulating lines, word lines, and the sidewalls as a mask.
8. The method as claimed in claim 1 , further comprising forming an ONO film on the semiconductor substrate, wherein forming the gate electrodes include forming the gate electrodes on the ONO film.