Junction isolation for magnetic read sensor
View Patent ↗Embodiments generally relate to a magnetic read sensor and a method for its manufacture. A multi-layer insulating material may be used to cover both the first shield layer and also the sidewalls of the sensor structure in the magnetic read sensor. The first insulating layer of the multi-layer insulating material may be deposited by an ion beam sputtering process in a chamber that does not have any oxygen gas flowing into it so that oxygen diffusion into the sensor structure is reduced or eliminated. Then, a second insulating layer of the multi-layer insulating material may be deposited by atomic layer deposition such that the second insulating layer has a greater quality than the first insulating layer. The higher quality increases the breakdown voltage for the magnetic read sensor. Thus, the magnetic read sensor of the present invention has an effective insulating portion that increases the breakdown voltage without sensor damage.
1. A magnetic read head, comprising:
a first shield layer;
a sensor structure formed over the first shield layer and having a top surface and sidewalls;
a first insulating layer formed over the first shield layer to a first thickness and the sidewalls of the sensor structure to a second thickness, wherein the first thickness is greater than the second thickness;
a second insulating layer formed over the first insulating layer, the second insulating layer having a third thickness over the entire first insulating layer;
a hard bias layer formed over the second insulating layer;
a hard bias capping layer formed over the hard bias layer;
a top lead layer formed over and directly contacting the hard bias capping layer, the top surface of the sensor structure, the first insulating layer, and the second insulating layer; and
a second shield layer formed over the top lead layer.
2. The magnetic read head of claim 1 , wherein the first insulating layer is not stoichiometric.
3. The magnetic read head of claim 2 , wherein the first insulating layer and the second insulating layer are aluminum oxide.
4. The magnetic read head of claim 1 , wherein a collective thickness of the first insulating layer and the second insulating layer over the first shield layer is greater than a collective thickness of the first insulating layer and the second insulating layer over the sidewalls of the sensor structure.
5. The magnetic read head of claim 4 , wherein the first insulating layer is not stoichiometric.
6. The magnetic read head of claim 5 , wherein the first insulating layer and the second insulating layer are aluminum oxide.
7. A magnetic read head, comprising:
a first shield layer;
a sensor structure formed over the first shield layer and having a top surface and sidewalls;
a non-stoichiometric aluminum oxide layer formed over the first shield layer to a first thickness and the sidewalls of the sensor structure to a second thickness;
a stoichiometric insulating layer formed over the non-stoichiometric aluminum oxide layer, the stoichiometric insulating layer having a third thickness over the entire non-stoichiometric aluminum oxide layer;
a hard bias layer formed over the stoichiometric insulating layer;
a hard bias capping layer formed over the hard bias layer;
a top lead layer formed over and directly contacting the hard bias capping layer, the top surface of the sensor structure, the non-stoichiometric aluminum oxide layer, and the stoichiometric insulating layer; and
a second shield layer formed over the top lead layer.
8. The magnetic read head of claim 7 , wherein the stoichiometric insulating layer comprises aluminum oxide.
9. The magnetic read head of claim 8 , wherein the first thickness is greater than the second thickness.
10. The magnetic read head of claim 7 , wherein a collective thickness of the non-stoichiometric aluminum oxide layer and the stoichiometric insulating layer over the first shield layer is greater than a collective thickness of the non-stoichiometric aluminum oxide layer and the stoichiometric insulating layer over the sidewalls of the sensor structure.
11. The magnetic read head of claim 10 , wherein the stoichiometric insulating layer comprises aluminum oxide.
12. A magnetic read head, comprising:
a first shield layer;
a sensor structure formed over the first shield layer and having a top surface and sidewalls;
a first insulating layer formed over the first shield layer by a physical vapor deposition process, wherein the first insulating layer formed over the first shield layer has a first thickness and the sidewalls of the sensor structure has a second thickness;
a second insulating layer formed over the first insulating layer by a conformal deposition process;
a hard bias layer formed over the second insulating layer;
a hard bias capping layer formed over the hard bias layer;
a top lead layer formed over and directly contacting the hard bias capping layer, the top surface of the sensor structure, the first insulating layer, and the second insulating layer; and
a second shield layer formed over the top lead layer.
13. The magnetic read head of claim 12 , wherein the first insulating layer is not stoichiometric.
14. The magnetic read head of claim 13 , wherein the first insulating layer and the second insulating layer are aluminum oxide.
15. The magnetic read head of claim 14 , wherein the first thickness is greater than the second thickness.
16. The magnetic read head of claim 12 , wherein a collective thickness of the first insulating layer and the second insulating layer over the first shield layer is greater than a collective thickness of the first insulating layer and the second insulating layer over the sidewalls of the sensor structure.
17. The magnetic read head of claim 16 , wherein the first insulating layer is not stoichiometric.
18. The magnetic read head of claim 17 , wherein the first insulating layer and the second insulating layer are aluminum oxide.
19. The magnetic read head of claim 18 , wherein the hard bias layer comprises CoPt.
20. The magnetic read head of claim 19 , wherein the second shield layer comprises a ferromagnetic material.