Laser beam irradiation apparatus for substrate sealing, and method of manufacturing organic light emitting display device by using the laser beam irradiation apparatus
View Patent ↗A laser beam irradiation apparatus irradiates a laser beam to a sealing unit disposed between a first substrate and a second substrate to seal the first substrate and the second substrate. The laser beam irradiation apparatus includes a laser head for irradiating the laser beam; and a control unit for controlling a drive-velocity and a drive-direction of the laser beam. The laser beam is controlled by the control unit which repetitively performs a backward and forward movement along a first direction, and passes a same position at least twice.
1. A method of manufacturing, an organic light emitting display device, the method comprising:
positioning a laser head to irradiate a laser beam onto a sealing unit;
driving a laser beam irradiation apparatus to irradiate the laser beam on the sealing unit disposed between a first substrate and a second substrate to seal the first substrate and the second substrate; and
enabling a control unit to control a drive-velocity and a drive-direction of the laser beam such that the laser beam repetitively performs a backward movement and a forward movement along a first direction of the sealing unit, and passes a same position in the sealing unit at least twice.
2. The method of claim 1 , wherein the backward and forward movements of the laser beam are performed at a velocity greater than 100 mm/sec.
3. The method of claim 1 , wherein:
the laser head further comprises a galvanometer mirror for performing the backward and forward movements of the laser beam, and
the control unit stores a computer program executed by a processor in the controller for controlling the galvanometer mirror to perform the backward and forward movements of the laser beam.
4. The method of claim 1 , wherein the laser head moves a linearly along the first direction at a velocity slower than a velocity of the backward and forward movements of the laser beam.
5. The method of claim 1 , further comprising a substrate stage below the first substrate and the second substrate, wherein the substrate stage performs a linear movement along the first direction at a velocity slower than a velocity of the backward and forward movement of the laser beam.
6. The method of claim 1 , wherein the laser beam is irradiated in a form of a spot beam.
7. The method of claim 6 , wherein a diameter of the spot beam is in a range which is at or between substantially a width of the sealing unit and twice as large as the width of the sealing unit.
8. The method of claim 6 , wherein a diameter of the spot beam is greater than zero and is less than a width of the sealing unit.
9. The method of claim 8 , wherein the control unit further controls the laser head to include a movement of the laser beam in a widthwise direction of the sealing unit in addition to the backward and forward movements of the laser beam such that the laser beam performs a rotational movement.
10. The method of claim 1 , wherein the sealing unit comprises frit.
11. A method of manufacturing an organic light emitting display device, the method comprising:
forming an organic light emitting unit on a first substrate or a second substrate;
forming a sealing unit between the first and second substrates along a path which surrounds the formed organic light emitting unit;
aligning the first substrate and the second substrate such that the formed organic light emitting unit is between the first and second substrates; and
repeatedly moving a laser beam backward and forward along the path of the sealing unit such that the laser beam passes a same position on the path at least twice by using a laser beam irradiation apparatus comprising a laser head for irradiating the laser beam and a control unit for controlling a drive-velocity and a drive-direction of the laser beam.
12. The method of claim 11 , wherein the first substrate or the second substrate transmits the laser beam.
13. The method of claim 11 , wherein, after the laser beam passes the same position at least twice, the same position of the sealing unit reaches a sealing temperature sufficient to seal the first substrate and the second substrate at the position.
14. The method of claim 13 , wherein the repeatedly moving the laser beam backward and forward comprises moving the laser beam such that, at the position, a cooling time during which a temperature linearly decreases from the sealing temperature is longer than a heating time taken to reach the sealing temperature.
15. The method of claim 11 , wherein the repeatedly moving the laser beam backward and forward comprises moving the laser beam backward and forward at a velocity greater than 100 mm/sec.
16. The method of claim 11 , wherein:
the repeatedly moving the laser beam backward and forward comprises using a galvanometer mirror of the laser beam irradiation apparatus for performing the backward and forward movement of the laser beam, and
executing a computer program using a processor of the control unit for controlling the galvanometer mirror to perform the backward and forward movement of the laser beam.
17. The method of claim 11 , further comprising moving the laser head along the path of the sealing unit from the position to a next position at a velocity slower than a velocity of the laser beam while moving backward and forward.
18. The method of claim 11 , further comprising moving a substrate stage linearly along a first direction at a velocity slower than a velocity of the laser beam while moving backward and forward, the substrate stage being further arranged below the first substrate and the second substrate.
19. The method of claim 11 , further comprising irradiating the laser beam in a form of a spot beam.
20. The method of claim 19 , wherein a diameter of the spot beam is within a range that is at or between substantially a width of the sealing unit and twice as large as the width of the sealing unit.
21. The method of claim 19 , wherein a diameter of the spot beam is less than a width of the sealing unit and is greater than zero.
22. The method of claim 21 , further comprising moving the laser beam in a widthwise direction of the sealing unit while moving laser beam backward and forward such that the laser beam performs a rotational movement along the path of the sealing unit.
23. The method of claim 11 , wherein the sealing unit comprises frit.
24. The method of claim 23 , wherein the forming the sealing unit comprises forming the frit as a closed loop to surround the organic light emitting unit.
25. The method of claim 11 , wherein:
the organic light emitting unit includes at least one organic light emitting device in which at least one organic layer is interposed between a first electrode and a second electrode, and
the at least one organic layer includes an emission layer.
26. The method of claim 11 , wherein, the repeatedly moving the laser beam backward and forward comprises the laser beam in a pattern comprising a first waveform having a first amplitude and a second waveform having a second amplitude which is less than the first amplitude.
27. The method of claim 26 , wherein the repeatedly moving the laser beam backward and forward comprises repeating the pattern of the first waveform and the second waveform at least twice.
28. The method of claim 26 , wherein an average value of the first waveform is not the same as an average value of the second waveform.
29. A computer readable medium encoded with processing instructions for implementing a method of claim 11 performed by at least one processor.