VCSEL with surface filtering structures
View Patent ↗Semiconductor devices are described that include a vertical cavity surface emitting laser (VCSEL) and a structure formed on or near the surface of the VCSEL that acts as a filter that benefits high-frequency VCSEL modulation performance.
1. A semiconductor device, comprising:
a vertical cavity surface emitting laser (VCSEL) comprising a semiconductor substrate and a plurality of layers, the plurality of layers including a light-generating active region, an N-type distributed Bragg reflector (N-DBR) layer above the substrate, a P-type DBR (P-DBR) layer above the N-DBR layer, and a metal electrical contact layer above the P-DBR layer, the metal electrical contact layer having an optical opening, the active region generating light in response to an injected electrical charge, the generated light directed through the optical opening in a direction substantially along a central optical axis normal to a plane of the substrate; and
a pattern formed in an annular region in a layer between the metal electrical contact layer and the P-DBR layer, the pattern extending in the annular region substantially continuously around the central optical axis outside the optical opening and directly beneath the metal electrical contact layer.
2. The semiconductor device claimed in claim 1 , wherein the layer having the pattern formed therein is a dielectric layer and comprises alternating regions of dielectric material and non-dielectric material.
3. The semiconductor device claimed in claim 2 , wherein the non-dielectric material comprises portions of the metal electrical contact layer extending into interstitial spaces in the pattern and contacting the P-DBR layer.
4. The semiconductor device claimed in claim 1 , wherein the pattern comprises a multiplicity of dielectric formations substantially evenly distributed in the annular region.
5. The semiconductor device claimed in claim 1 , wherein the layer of layer having the pattern formed therein includes alternating regions of direct ohmic contact between the P-DBR layer and the metal electrical contact layer and regions of doped semiconductor material, the regions of doped semiconductor material being disposed in the layer between the metal electrical contact layer and the P-DBR layer and doped differently from the P-DBR layer.
6. The semiconductor device claimed in claim 5 , wherein the pattern comprises a multiplicity of regions of doped semiconductor material substantially evenly distributed in the annular region.
7. The semiconductor device claimed in claim 1 , wherein the pattern comprises a layer of alternating regions of ion-implanted material and non-implanted material.
8. The semiconductor device claimed in claim 7 , wherein the pattern comprises a multiplicity of regions of ion-implanted material substantially evenly distributed in the annular region.
9. A semiconductor device, comprising:
a vertical cavity surface emitting laser (VCSEL) comprising a semiconductor substrate and a plurality of layers, the plurality of layers including a light-generating active region and a metal electrical contact layer having an optical opening, the active region generating light in a direction substantially along a central optical axis through the optical opening in response to an injected electrical charge; and
a Schottky layer formed in an annular region outside the optical opening and directly beneath and in contact with the metal electrical contact layer.
10. The semiconductor device claimed in claim 9 , wherein the Schottky layer has a pattern.
11. The semiconductor device claimed in claim 9 , wherein:
the VCSEL includes an N-type distributed Bragg reflector (N-DBR) layer above the substrate, a P-type DBR (P-DBR) layer above the N-DBR layer, a metal contact layer above the P-DBR layer, and a dielectric layer between the metal electrical contact layer and the P-DBR layer; and
the Schottky layer is disposed between the P-DBR layer and the metal electrical contact layer and electrically coupling the P-DBR layer to the metal layer.
12. The semiconductor device claimed in claim 11 , wherein the Schottky layer comprises a metallic material.
13. The semiconductor device claimed in claim 11 , wherein the Schottky layer comprises a semiconductor material.