Apparatus for processing substrate
View Patent ↗A substrate processing apparatus that simultaneously forms thin films on a plurality of substrates and performs heat treatment includes: a plurality of substrate holders, each including a substrate support that supports a substrate and a first gas pipe having one or a plurality of injection holes; a boat where the plurality of substrate holders are stacked and including a second gas pipe connected with the first gas pipe of each of the substrate holders; a process chamber providing a space in which the substrates stacked in the boat are processed; a conveying unit that carries the boat into/out of the process chamber; a first heating unit disposed outside the process chamber; and a gas supply unit including a third gas pipe connected with the second gas pipe and supplying a heated or cooled gas into the second gas pipe.
1. A substrate processing apparatus, comprising:
a plurality of substrate holders, each substrate holder comprising a substrate support to support a substrate and a first gas pipe having at least one injection hole;
a boat to stack the plurality of substrate holders and comprising:
a second gas pipe connected to the first gas pipe of each of the substrate holders; and
a plurality of protrusions disposed vertically, each protrusion extending radially inward from a body of the boat,
the second gas pipe being disposed within the protrusions;
a process chamber in which the substrates are processed;
a conveying unit to move the boat in or out of the process chamber;
a first heating unit disposed outside the process chamber;
a gas supply unit connected to a third gas pipe connected to the second gas pipe, the gas supply unit to supply a gas to the second gas pipe via the third gas pipe; and
a connecting member disposed between each of the substrate holders and the protrusions,
wherein the first gas pipe is connected to the second gas pipe disposed within each protrusion via the connecting member, and the substrate holders are horizontally supported by the protrusions via the connecting member.
2. The apparatus of claim 1 , wherein each of the first gas pipes is disposed in one of the substrate supports.
3. The apparatus of claim 1 , wherein the second gas pipe is disposed in the boat.
4. The apparatus of claim 1 , wherein the connecting member is disposed between each of the first gas pipes and the second gas pipe.
5. The apparatus of claim 1 , wherein each of the first gas pipes comprises nozzles disposed at the at least one injection hole at an angle with respect to the surface of the substrate support.
6. The apparatus of claim 5 , wherein the nozzles are configured to inject the gas through the first gas pipes in a plurality of directions.
7. The apparatus of claim 1 , wherein the conveying unit comprises an insulating unit.
8. The apparatus of claim 7 , wherein the insulating unit comprises at least one insulating plate and insulating holders to support the insulating plates.
9. The apparatus of claim 7 , wherein the conveying unit further comprises a second heating unit disposed between the insulating unit and the boat.
10. The apparatus of claim 1 , wherein the process chamber comprises:
a first tube to prevent external air from flowing to the substrates; and
a manifold to provide a space to hold the boat.
11. The apparatus of claim 10 , further comprising a second tube comprising a first hole to allow passage of the third gas pipe, the second tube configured to be disposed between the manifold and the conveying unit.
12. The apparatus of claim 1 , further comprising a shutter disposed under the process chamber.