Process for the phase transformation of substances
View Patent ↗Process for the phase transformation of substances and mixtures of substances, in which the substance or the mixture of substances is introduced into a plasma reactor, the substance or the mixture of substances is converted into the higher-energy phase and the product is removed in gaseous form from the plasma reactor. The process can be used for the sublimation of metal salts, metal nitrates and/or metal alkoxides and other vaporizable metal-organic compounds.
1. A process for the phase transformation of a substance or a mixture of substances, comprising introducing the substance or the mixture of substances into a plasma reactor, converting the substance or the mixture of substances into the higher-energy phase, and removing the product in gaseous form or as aerosol in a suitable form from the plasma reactor.
2. The process according to claim 1 , wherein the substance comprises a metal salt, a metal nitrate a metal alkoxide and/or other vaporizable metal-organic compounds.
3. The process according to claim 1 , wherein the substance comprises a metal halide or a metal nitrate or a metal alkoxide which is vaporized in the process.
4. The process according to claim 1 , wherein the substance comprises a metal halide which is sublimed in the process.
5. The process according to claim 1 , wherein the substance comprises a metal salt which is melted and, optionally, subsequently vaporized in the process.
6. The process according to claim 4 , wherein the substance comprises aluminium trichloride which is sublimed in the process.
7. The process according to claim 1 , wherein the phase conversion occurs in the ionized gas generated by the discharge.
8. The process according to claim 3 , wherein the substance comprises a metal halide selected from the group consisting of SiCl 4 , TiCl 4 , SnCl 4 , and VdCl 4 .
9. The process according to claim 4 , wherein the substance comprises a metal halide selected from the group consisting of AlCl 3 , ZrCl 4 , NbCl 4 , InCl 3 , and FeCl 3 .
10. The process according to claim 5 , wherein the substance comprises a metal salt selected from the group consisting of YCl 3 , SnCl 2 , NbCl 4 and FeCl 2 .