Thin film photoelectric conversion device and method for manufacturing the same

1. A thin film photoelectric conversion device, comprising:

a substrate, a transparent electrode layer, a photoelectric conversion unit, and a back electrode layer, wherein the transparent electrode layer is arranged between the substrate and photoelectric conversion unit and the photoelectric conversion unit is arranged between the transparent electrode layer and the back electrode layer;

wherein one line segment in a parallel direction to a main surface of the substrate is taken as X, the film thickness of the transparent electrode layer is taken as Zt, the film thickness of the photoelectric conversion unit is taken as Zs, the change in thickness Zt with respect to a length extending parallel to X is taken as ΔZt, and the change in thickness Zs with respect to a length extending parallel to X is taken as ΔZs,

wherein, when measured along X between the center and an end portion of the device over an interval of 5 mm to 100 mm, the ΔZt is continuously positive and ΔZs is continuously negative or ΔZt is continuously negative and ΔZs is continuously positive.

2. The thin film photoelectric conversion device according to claim 1 , wherein

the film thickness Zt of the transparent electrode layer is larger at a peripheral portion of the substrate as compared with a central portion thereof and the film thickness Zs of the photoelectric conversion unit is smaller at the peripheral portion of the substrate as compared with the central portion thereof, and absolute values of ΔZt and ΔZs are more than 0.2%/cm, or

the film thickness Zt of the transparent electrode layer is smaller at the peripheral portion of the substrate as compared with the central portion thereof and the film thickness Zs of the photoelectric conversion unit is larger at the peripheral portion of the substrate as compared with the central portion thereof, and absolute values of ΔZt and ΔZs are more than 0.2%/cm.

3. The thin film photoelectric conversion device according to claim 1 , wherein

the substrate is rectangular,

a film thickness Zta of the transparent electrode layer proximate at least one corner “a” of the substrate is larger than a film thickness Ztb of the transparent electrode layer proximate any other corner “b” of the substrate, and

a film thickness Zsa of the photoelectric conversion unit proximate the corner “a” is smaller than a film thickness Zsb of the photoelectric conversion unit-proximate the corner “b”.

4. The thin film photoelectric conversion device according to claim 1 , wherein a distribution of the film thickness of the transparent electrode layer and a distribution of the film thickness of the photoelectric conversion unit have an opposite thickness-distribution relation.

5. The thin film photoelectric conversion device according to claim 1 , wherein

in the transparent electrode layer, a central portion of a film formation surface has a smaller thickness and a peripheral portion of the film formation surface has a larger thickness, and

in the photoelectric conversion unit, a central portion of a film formation surface has a larger thickness and a peripheral portion of the film formation surface has a smaller thickness.

6. The thin film photoelectric conversion device according to claim 1 , wherein the photoelectric conversion unit is one or more selected from the group consisting of:

at least one amorphous photoelectric conversion unit;

at least one crystalline photoelectric conversion unit; and

a photoelectric conversion unit including both at least one amorphous photoelectric conversion unit and at least one crystalline photoelectric conversion unit.

7. The thin film photoelectric conversion device according to claim 1 , wherein

the transparent electrode layer, the photoelectric conversion unit and the back electrode layer are divided by a plurality of separation grooves so as to form a plurality of photoelectric conversion cells, and

the plurality of photoelectric conversion cells are electrically connected in series with one another through a plurality of connection grooves.

8. The thin film photoelectric conversion device according to claim 7 , wherein a direction in which the plurality of photoelectric conversion cells are connected in series is made substantially the same as a direction of the line segment X.

9. The thin film photoelectric conversion device according to claim 1 , wherein an area of the substrate is not smaller than 900 cm 2 .

10. A method for manufacturing the thin film photoelectric conversion device according to claim 1 , the method at least comprising:

a step of separately forming a transparent electrode layer and a photoelectric conversion unit so that a film thickness distribution of the transparent electrode layer and a film thickness distribution of the photoelectric conversion unit have an opposite thickness- distribution relation to each other.

11. A method for manufacturing the thin film photoelectric conversion device according to claim 1 , wherein

the transparent electrode layer is zinc oxide formed by a low-pressure thermal CVD method, and

as for temperatures of the substrate in forming the transparent electrode layer, a difference is made between a temperature of the central portion of the substrate and a temperature of the peripheral portion of the substrate.