Plate wave element and electronic equipment using same
A plate wave element includes a piezoelectric body, a comb-shaped electrode disposed on an upper surface of the piezoelectric body, and a medium layer disposed on the upper surface of the piezoelectric body so as to cover the comb-shaped electrode. The comb-shaped electrode excites a Lamb wave as a main wave. The medium layer has a frequency temperature characteristic opposite to that of the piezoelectric body. The plate wave element has a preferable frequency temperature characteristic.
1. A plate wave element comprising:
a piezoelectric body;
a comb-shaped electrode disposed on an upper surface of the piezoelectric body, the comb-shaped electrode exciting a Lamb wave as a main wave;
a first medium layer disposed on the upper surface of the piezoelectric body so as to cover the comb-shaped electrode; and
a second medium layer that is disposed on a lower surface of the piezoelectric body
wherein the first medium layer is made of silicon oxide,
the piezoelectric is made of lithium niobate, a thickness H 1 of the piezoelectric body, a wavelength λ of the Lamb wave, and a thickness H 2 of the first medium layer satisfy a condition that,
when a ratio H 1 /λ is not less than 0.075 less than 0.125, a ratio H 2 /λ is 0.048 to 0.080,
when the ratio H 1 /λ is not less than 0.125 less than 0.175, the ratio H 2 /λ is 0.067 to 0.108,
when the ratio H 1 /λ is not less than 0.175 less than 0.225, the ratio H 2 /λ is 0.084 to 0.136, and
when ratio H 1 /λ is not less than 0.225 less than 0.275, ratio H 2 /λ is set at 0.103 to 0.175.
2. The plate wave element of claim 1 , wherein the piezoelectric body is formed of a piezoelectric single-crystal substrate cut by a plane whose normal is a c-axis of the crystal structure.
3. The plate wave element of claim 2 , wherein a crystal structure of the piezoelectric body is a rotation twin crystal about a normal of the upper surface of the piezoelectric body, the normal being the c-axis.
4. The plate wave element of claim 1 , wherein the piezoelectric body is formed of a piezoelectric thin film in which a normal of the upper surface of the piezoelectric body is oriented as a c-axis.
5. An electronic device comprising:
the plate wave element of claim 1 ; and
a signal line connected to the plate wave element.
6. A plate wave element comprising:
a piezoelectric body;
a comb-shaped electrode disposed on an upper surface of the piezoelectric body, the comb-shaped electrode exciting a Lamb wave as a main wave;
a first medium layer disposed on the upper surface of the piezoelectric body so as to cover the comb-shaped electrode; and
a second medium layer that is disposed on a lower surface of the piezoelectric body,
wherein the first medium layer is made of silicon oxide,
the piezoelectric body is made of lithium niobate, a thickness H 1 of the piezoelectric body, a wavelength λ of the Lamb wave, and a thickness H 2 of the first medium layer satisfy a condition that,
when a ratio H 1 /λ is not less than 0.075 less than 0.125, a ratio H 2 /λ is larger than 0 and smaller than 0.032,
when ratio H 1 /λ is not less than 0.125 less than 0.175, ratio H 2 /λ is larger than 0 and smaller than 0.046,
when ratio H 1 /λ is not less than 0.175 less than 0.225, ratio H 2 /λ is larger than 0 and smaller than 0.061,
when ratio H 1 /λ is not less than 0.225 less than 0.275, ratio H 2 /λ is larger than 0 and smaller than 0.084, and
when ratio H 1 /λ is not less than 0.275 less than 0.325, ratio H 2 /λ is larger than 0 and smaller than 0.110.
7. The plate wave element of claim 6 , wherein the piezoelectric body is formed of a piezoelectric single-crystal substrate cut by a plane whose normal is a c-axis of the crystal structure.
8. The plate wave element of claim 7 , wherein a crystal structure of the piezoelectric body is a rotation twin crystal about a normal of the upper surface of the piezoelectric body, the normal being the c-axis.
9. The plate wave element of claim 6 , wherein the piezoelectric body is formed of a piezoelectric thin film in which a normal of the upper surface of the piezoelectric body is oriented as a c-axis.
10. An electronic device comprising:
the plate wave element of claim 6 ; and
a signal line connected to the plate wave element.
11. A plate wave element comprising:
a piezoelectric body;
a comb-shaped electrode disposed on an upper surface of the piezoelectric body, the comb-shaped electrode exciting a plate wave;
a first medium layer disposed on the upper surface of the piezoelectric body so as to cover the comb-shaped electrode, a transverse wave propagating through the first medium layer at a speed higher than a speed of a transverse wave at the plate wave;
a second medium layer disposed on a lower surface of the piezoelectric body, a transverse wave propagating through the second medium layer at a speed higher than a speed of a transverse wave at the plate wave;
a first sound absorbing layer disposed on an upper surface of the first medium; and
a second sound absorbing layer disposed on a lower surface of the second medium.
12. The plate wave element of claim 11 , wherein a thickness of the first medium layer and a thickness of the second medium layer are greater than a wavelength of the plate wave.
13. The plate wave element of claim 11 , wherein a thickness of the piezoelectric body and a thickness of the comb-shaped electrode are determined such that the speed of the plate wave is lower than a speed of a transverse wave propagating through the first medium layer and a speed of a transverse wave propagating through the second medium layer.
14. A plate wave element comprising:
a piezoelectric body;
a comb-shaped electrode disposed on an upper surface of the piezoelectric body, the comb-shaped electrode exciting a plate wave;
a first medium layer disposed on the upper surface of the piezoelectric body so as to cover the comb-shaped electrode, a transverse wave propagating through the first medium layer at a speed higher than a speed of a transverse wave at the plate wave; and
a second medium layer disposed on a lower surface of the piezoelectric body, a transverse wave propagating through the second medium layer at a speed higher than a speed of a transverse wave at the plate wave,
wherein the first medium layer and the second medium layer are made of medium identical to each other.
15. The plate wave element of claim 14 , wherein a thickness of the first medium layer and a thickness of the second medium layer are greater than a wavelength of the plate wave.
16. The plate wave element of claim 14 , wherein a thickness of the piezoelectric body and a thickness of the comb- shaped electrode are determined such that the speed of the plate wave is lower than a speed of a transverse wave propagating through the first medium layer and a speed of a transverse wave propagating through the second medium layer.
17. A plate wave element comprising:
a piezoelectric body;
a comb-shaped electrode disposed on an upper surface of the piezoelectric body, the comb-shaped electrode exciting a plate wave;
a first medium layer disposed on the upper surface of the piezoelectric body so as to cover the comb-shaped electrode, a transverse wave propagating through the first medium layer at a speed higher than a speed of a transverse wave at the plate wave; and
a second medium layer disposed on a lower surface of the piezoelectric body, a transverse wave propagating through the second medium layer at a speed higher than a speed of a transverse wave at the plate wave,
wherein a crystal structure of the piezoelectric body is a rotation twin crystal about a normal of the upper surface of the piezoelectric body, the normal being a c-axis of the crystal structure.
18. The plate wave element of claim 17 , wherein a thickness of the first medium layer and a thickness of the second medium layer are greater than a wavelength of the plate wave.
19. The plate wave element of claim 17 , wherein a thickness of the piezoelectric body and a thickness of the comb- shaped electrode are determined such that the speed of the plate wave is lower than a speed of a transverse wave propagating through the first medium layer and a speed of a transverse wave propagating through the second medium layer.
20. A plate wave element comprising:
a piezoelectric body;
a comb-shaped electrode disposed on an upper surface of the piezoelectric body, the comb-shaped electrode exciting a plate wave;
a first medium layer disposed on the upper surface of the piezoelectric body so as to cover the comb-shaped electrode;
a second medium layer disposed on a lower surface of the piezoelectric body;
a third medium layer disposed on an upper surface of the first medium layer, a transverse wave propagating through the third medium layer at a speed higher than a speed of a transverse wave at the plate wave; and
a fourth medium layer disposed on a lower surface of the second medium layer, a transverse wave propagating through the fourth medium layer at a speed higher than a speed of a trans verse wave at the plate wave, wherein
a transverse wave propagates through the first medium layer at a speed lower than a speed of a transverse wave propagating through the third medium layer, and
a transverse wave propagates through the second medium layer at a speed lower than a speed of a transverse wave propagating through the fourth medium layer.
21. The plate wave element of claim 20 , wherein the first medium layer and the second medium layer are made of silicon oxide.
22. The plate wave element of claim 20 , wherein the comb-shaped electrode excites a Lamb wave as a main wave.
23. The plate wave element of claim 20 , wherein a thickness of the third medium layer and a thickness of the fourth medium layer are substantially identical to each other.
24. The plate wave element of claim 20 , wherein the third medium layer and the fourth medium layer are made of medium identical to each other.
25. The plate wave element of claim 20 , wherein a crystal structure of the piezoelectric body is a rotation twin crystal about a normal of the upper surface of the piezoelectric body, the normal being a c-axis of the crystal structure.
26. An electronic device comprising:
the plate wave element of claim 20 ; and
a signal line connected to the plate wave element.