Sealing film for organic EL element, organic EL element, and organic EL display
An object of this invention is to provide a sealing film for an organic EL element having excellent moisture resistance, due to the absence of pinholes. A sealing film of this invention is a sealing film for an organic EL element having a layered structure of at least three layers with a silicon nitride film and a silicon oxynitride film layered in alternation, and is characterized in that odd-numbered layers from the side of the organic EL element are silicon nitride films having a film thickness (T 1 ) of 200 nm or greater, and even-numbered layers from the side of the organic EL element are silicon oxynitride films having a film thickness (T 2 ) of 20 nm or greater and 50 nm or less.
1. A sealing film for an organic EL element, having a layered structure of at least three layers with a silicon nitride film and a silicon oxynitride film layered in alternation, characterized in that
odd-numbered layers from the side of the organic EL element are silicon nitride films having a film thickness T 1 of 200 nm or greater,
even-numbered layers from the side of the organic EL element are silicon oxynitride films having a film thickness T 2 of 20 nm or greater and 50 nm or less, and
an uppermost layer is the silicon nitride film.
2. An organic EL element comprising, in order, a supporting substrate, a lower electrode, an organic EL layer, an upper electrode, and a sealing film, characterized in that
the sealing film has a layered structure of at least three layers with a silicon nitride film and a silicon oxynitride film layered in alternation,
a lowermost layer of the sealing film in contact with the upper electrode as well as odd-numbered layers from the lowermost layer are silicon nitride films having a film thickness T 1 of 200 nm or greater,
even-numbered layers from the lowermost layer of the sealing film are silicon oxynitride films having a film thickness T 2 of 20 nm or greater and 50 nm or less, and
an uppermost layer of the sealing film is a silicon nitride film.
3. An organic EL display, comprising the organic EL element according to claim 2 , and a color conversion layer.