Organic EL device and process for manufacturing same

1. An organic EL device, comprising:

a substrate; and

an organic EL element formed on the substrate,

wherein the organic EL element comprises; a bottom electrode;

an organic EL layer;

a top electrode; and

a protective layer,

wherein the protective layer is composed of one or a plurality of inorganic films, and at least one of the one or plurality of inorganic films is a hydrogen-containing silicon oxide nitride film having stretching-mode peak area ratios, as determined by infrared absorption spectroscopy, that include an absorption area ratio of N—H bonds to Si—N bonds in the hydrogen-containing silicon oxide nitride film which is not less than 0.04 but not more than 0.07 and an absorption area ratio of Si—H bonds to Si—N bonds which is not more than 0.15.

2. The organic EL device according to claim 1 , wherein the protective layer is positioned between the substrate and the bottom electrode.

3. The organic EL device according to claim 2 , wherein each of the one or plurality of inorganic films has a stress with an absolute value smaller than 20 MPa.

4. The organic EL device according to claim 1 , wherein the protective layer is positioned on a top side of the top electrode.

5. The organic EL device according to claim 4 , wherein each of the one or plurality of inorganic films has a stress with an absolute value smaller than 20 MPa.

6. The organic EL device according to claim 1 , wherein each of the one or plurality of inorganic films has a stress with an absolute value smaller than 20 MPa.

7. The organic EL device according to claim 1 , wherein absorption areas for the N—H bonds, Si—H bonds and Si—N bonds are determined by the steps of: (a) measuring an infrared absorption spectrum for the silicon oxide nitride film with wavenumber as the horizontal axis, (b) correcting the infrared absorption spectrum by subtracting a baseline therefrom, (c) peak-separating the absorption of the N—H bonds, Si—H bonds and Si—N bonds by using Gaussian functions, and (d) determining surface areas of the separated peaks, and

the absorption area for the N—H bonds is determined from a peak present at 3250 to 3400 cm −1 , the absorption area for the Si—H bonds is determined from a peak present at 2100 to 2200 cm −1 , and the absorption area for the Si—N bonds is determined from a peak present at 830 to 870 cm −1 .

8. A method of manufacturing an organic EL device, comprising the steps of:

(1) preparing a substrate; and

(2) forming an organic EL element including a bottom electrode an organic EL layer a top electrode and a protective layer composed of one or a plurality of inorganic films in which at least one of the one or a plurality of inorganic films is a hydrogen-containing silicon oxide nitride film having stretching-mode peak area ratios, as determined by infrared absorption spectroscopy, that include an absorption area ratio of N—H bonds to Si—N bonds in the hydrogen-containing silicon oxide nitride film which is not less than 0.04 but not more than 0.07 and an absorption area ratio of Si—H bonds to Si—N bonds which is not more than 0.15,

wherein, in step (2), the hydrogen-containing silicon oxide nitride film is formed by chemical vapor deposition in which radio frequency power of at least 25 MHz but not more than 60 MHz is applied to a mixed gas containing monosilane, ammonia and nitrogen at a flow rate ratio of ammonia to monosilane which is at least 0.5 but not more than 1 and a flow rate ratio of N 2 O to monosilane which is greater than 0 but smaller than 0.2.