METHOD FOR MODULATING LIGHT WITH MULTIPLE ELECTRODES
Improvements in an interferometric modulator that has a cavity defined by two walls.
1 . A method of making a MEMS device, the method comprising:
providing a substrate;
forming a first layer on the substrate;
coupling first and second electrodes to the first layer;
forming a sacrificial layer on the first layer;
forming a second layer on the sacrificial layer; and
forming a cavity between the first and second layers by removing the sacrificial layer, wherein the cavity has a variable dimension, and is configured to cause the MEMS device to reflect a wavelength of light, and the first layer is configured to move relative to the second layer.
2 . The method of claim 1 , wherein the first and second electrodes are formed so as to be adjacent to one another.
3 . The method of claim 1 , wherein a first edge of the first electrode and a first edge of the second electrode are formed so as to be substantially parallel.
4 . The method of claim 1 , wherein at least one of the first and second electrodes are formed so as to be substantially rectangular.
5 . The method of claim 1 , wherein the first and second layers are at least partially reflective.
6 . The method of claim 1 , wherein the first and second electrodes are formed on the first layer.
7 . The method of claim 1 , wherein the second layer is configured to move.
8 . A MEMS device manufactured by the process of claim 1 .