METHOD OF STORING EVALUATION RESULT, METHOD OF DISPLAYING EVALUATION RESULT, AND EVALUATION RESULT DISPLAY DEVICE

1 . A method of storing an evaluation result comprising the steps of:

changing a first physical value specified in advance and related to a transistor constituting a semiconductor integrated circuit;

changing a second physical value different from the first physical value;

measuring a deterioration value of reliability of the transistor with time according to the first physical value and the second physical value through a reliability evaluation;

dividing the deterioration value into a plurality of first continuous regions with a first value from a minimum deterioration value to a maximum deterioration value to obtain divided deterioration values;

dividing the first physical value into a plurality of second continuous regions with a second value;

dividing the second physical value into a plurality of third continuous regions with a third value; and

storing the divided deterioration values in a storage unit according to the first continuous regions and the second continuous regions.

2 . A method of displaying an evaluation result, comprising the steps of:

changing a first physical value specified in advance and related to a transistor constituting a semiconductor integrated circuit;

changing a second physical value different from the first physical value;

measuring a deterioration value of reliability of the transistor with time according to the first physical value and the second physical value through a reliability evaluation;

storing evaluation result information indicating the deterioration value in a storage unit;

retrieving the evaluation result information from the storage unit;

dividing the deterioration value into a plurality of first continuous regions with a first value from a minimum deterioration value to a maximum deterioration value to obtain divided deterioration values;

dividing the first physical value into a plurality of second continuous regions with a second value;

dividing the second physical value into a plurality of third continuous regions with a third value; and

displaying the divided deterioration values on a display unit as a table representing different states of the divided deterioration values according to the second continuous regions and the third continuous regions.

3 . The method of displaying the evaluation result according to claim 2 , wherein, in the step of displaying the divided deterioration values on the display unit as the table representing the different states of the divided deterioration values, said different states are displayed as patterns or colors.

4 . The method of displaying the evaluation result according to claim 2 , wherein, in the steps of changing the first physical value and changing the second physical value, at least one of said first physical value and said second physical value includes at least one of a gate length of the transistor, a gate width of the transistor, and a drain voltage to be applied to a drain electrode of the transistor.

5 . The method of displaying the evaluation result according to claim 2 , wherein, in the steps of changing the first physical value and changing the second physical value, at least one of said first physical value and said second physical value includes at least one of a gate voltage to be applied to a gate electrode of the transistor and a temperature of the transistor.

6 . The method of displaying the evaluation result according to claim 2 , wherein, in the steps of measuring the deterioration value of the reliability of the transistor with time, said deterioration value is measured through a plurality of reliability evaluations having different ratios of periods of time during which the transistor is turned on relative to a specific period of time, and said evaluation result information is stored in the storage unit so that the table is displayed on the display unit according to the evaluations having the different ratios.

7 . The method of displaying the evaluation result according to claim 2 , further comprising the step of calculating at least one of the first physical value and the second physical value smaller than the minimum value according to the evaluation result information.

8 . An evaluation result display device, comprising:

a storage unit for storing evaluation result information indicating a deterioration value of reliability of a transistor with time measured through a reliability evaluation according to a first physical value specified in advance and related to the transistor constituting a semiconductor integrated circuit and a second physical value different from the first physical value while changing the first physical value and the second physical value;

a retrieving unit for retrieving the evaluation result information from the storage unit;

a display unit for displaying the deterioration value indicated as the evaluation result information as a table representing different states of the deterioration value according to divided deterioration values obtained through dividing the deterioration value into a plurality of continuous regions with a value of a predetermined range from a minimum deterioration value to a maximum deterioration value, and correlating the divided deterioration values to a plurality of continuous regions of the first physical value divided with a value of a predetermined range and a plurality of continuous regions of the second physical value divided with a value of a predetermined range; and

a control unit for controlling the display unit to display the table.