Alignment system and method for operating the same
View Patent ↗An alignment system includes a stage configured to retain an object, an image-capturing device configured to capture the image of the field of view of the microscope, and a processing module configured to generate a virtual mask and superimpose the virtual mask with the image of the object. In one embodiment of the present invention, a method for operating a virtual mask system includes the steps of generating a virtual mask, placing a first object on a stage, capturing at least one image of the first object, and superimposing the virtual mask with the image of the first object by adjusting a position or an inclined angle of the stage or adjusting a capturing position of an image-capturing device by considering at least the virtual mask and the image of the first object.
1. An alignment system, comprising:
a stage configured to retain a first object and a second object;
a virtual mask having a layout design of the first object, a layout design of the second object, and a relative position of the first object to the second object;
an image-capturing device configured to capture at least one image of the first object and at least one image of the second object;
a processing module configured to read the virtual mask for at least one alignment,
wherein the processing module is configured to align the layout design of the first object of the virtual mask with the image of the first object for a first alignment, wherein the first object is placed according to the first alignment,
wherein the processing module is configured to align the layout design of the second object of the virtual mask with the image of the second object for a second alignment, wherein the second object is placed according to the second alignment; and
an apparatus configured to pick up the first object from the stage after the first alignment and to couple the first object with the second object after the second object is placed on the stage after the second alignment.
2. The alignment system of claim 1 , wherein the image-capturing device comprises:
an image sensor;
a microscope positioned between the image sensor and the object;
a position-sensing device configured to provide a capturing position where the image-capturing device captures the image of the first object;
a zoom controller configured to control a zooming rate of the image-capturing device, wherein the processing module is configured to control the zooming rate and the size of the virtual mask and an image of the field of view of the microscope will be zoomed or reduced with the zooming rate.
3. The alignment system of claim 2 , wherein the microscope is a lens set or a reflective imaging lens set.
4. The alignment system of claim 1 , further comprising a display configured to display the virtual mask or the image of the first object.
5. The alignment system of claim 1 , wherein the processing module is configured to read the virtual mask which was generated by executing a computer-aided design (CAD) program.
6. The alignment system of claim 1 , wherein the captured image of the first object includes images of different portions of the object captured at different position of the microscope or at different zooming rates.
7. The alignment system of claim 1 , wherein the virtual mask comprises a layout design of the first object and a layout design of the second object.
8. The alignment system of claim 1 , wherein the virtual mask comprises at least one set of alignment marks.
9. The alignment system of claim 1 , wherein the first object is a device, and the second object is a substrate.
10. The alignment system of claim 1 , wherein the processing module is configured to control a position or an inclined angle of the stage or to control the capturing position of the image-capturing device by considering at least the virtual mask and the image of the first object.
11. A method for operating an alignment system, comprising the steps of:
reading a virtual mask, wherein the virtual mask having a layout design of a first object, a layout design of a second object, and a relative position of the first object to the second object;
placing the first object on a stage;
capturing at least one image of the first object;
aligning the layout design of the first object of the virtual mask with the image of the first object for a first alignment, wherein the first alignment includes adjusting a position of the first object until the layout design of the first object of the virtual mask is superpositioned with the image of the first object, wherein the position of the first object of the first alignment is recorded;
picking up the first object from the stage after the first alignment is achieved;
placing a second object on the stage;
capturing at least one image of the second object;
aligning the layout design of the second object of the virtual mask with the image of the second object for a second alignment, wherein the second alignment includes adjusting a position of the second object until the layout design of the second object of the virtual mask is superpositioned with the image of the second object, wherein the position of the second object of the second alignment is recorded; and
placing the first object according to its recorded position of the first alignment to couple with the second object according to its recorded position of the second alignment.
12. The method for operating an alignment system of claim 11 , wherein the at least one image of the first object includes images of different portions of the first object or at different zooming rates.
13. The method for operating an alignment system of claim 11 , wherein the virtual mask is generated by executing a computer-aided design (CAD) program.
14. The method for operating an alignment system of claim 11 , wherein the virtual mask comprises at least one set of alignment marks.
15. The method for operating an alignment system of claim 11 , wherein the at least one image of the second object includes images of different portions of the second object or at different zooming rates.
16. The method for operating an alignment system of claim 11 , wherein the virtual mask comprises at least a layout design of the first object and of the second object.
17. The method for operating an alignment system of claim 11 , wherein the capturing of the at least one image of the first object or the second object is performed by using an image-capturing device equipped with a microscope.
18. The method for operating an alignment system of claim 17 , wherein the microscope is a lens set or a reflective imaging lens set.
19. The method for operating an alignment system of claim 11 ,
wherein the first object is a device.
20. The method for operating an alignment system of claim 11 , wherein the second object is a substrate.
21. The method for operating an alignment system of claim 11 , wherein the first object after the first alignment is then bonded with the second object after the second alignment.