Liquid crystal display device and manufacturing method for same
View Patent ↗The present invention provides a liquid crystal display device having gate wires and source/drain wires with a multilayer structure made of the same material which can be manufactured at low cost, as well as a manufacturing method for the same. In accordance with the manufacturing method, a wet etching process is carried out on the gate wires and the source/drain wires using an etchant including hydrofluoric acid and an oxidant, and the concentration of hydrofluoric acid in the etchant is different between the etchant for the gate wires and that for the source/drain wires.
1. A manufacturing method for a liquid crystal display device having gate wires and source/drain wires, each with a multilayer structure and made of the same material, characterized in that
a wet etching process is carried out on the gate wires and the source/drain wires using an etchant including hydrofluoric acid and an oxidant where the concentration of hydrofluoric acid in the etchant is different for the etchant for the gate wires and the etchant for the source/drain wires, and further characterized in that
titanium, aluminum or an alloy thereof and titanium are layered in sequence in the multilayer structure.
2. The manufacturing method for a liquid crystal display device according to claim 1 , characterized in that the concentration of hydrofluoric acid is lower in the etchant for processing the source/drain wires than in the etchant for processing the gate wires.
3. The manufacturing method for a liquid crystal display device according to claim 1 , characterized in that the concentration of hydrofluoric acid for the etchant for processing the gate wires is in a range from 0.7% to 1.3% and the concentration of hydrofluoric acid for the etchant for processing the source/drain wires is in a range from 0.1% to 0.5%.
4. The manufacturing method for a liquid crystal display device according to claim 1 , characterized in that an angle of a taper of the gate wires is smaller than an angle of a taper of the source/drain wires.
5. The manufacturing method according to claim 1 , wherein the alloy of aluminum is AlSi or AlCu.
6. The manufacturing method according to claim 1 , wherein the oxidant is selected from the group consisting of hydrogen peroxide, nitric acid and sulfuric acid.
7. The manufacturing method according to claim 1 , wherein the etchant further includes water.