Solar cell fabrication using extruded dopant-bearing materials
View Patent ↗Wafer-based solar cells are efficiently produced by extruding a dopant bearing material (dopant ink) onto one or more predetermined surface areas of a semiconductor wafer, and then thermally treating the wafer to cause diffusion of dopant from the dopant ink into the wafer to form corresponding doped regions. A multi-plenum extrusion head is used to simultaneously extrude interdigitated dopant ink structures having two different dopant types (e.g., n-type dopant ink and p-type dopant ink) in a self-registered arrangement on the wafer surface. The extrusion head is fabricated by laminating multiple sheets of micro-machined silicon that define one or more ink flow passages. A non-doping or lightly doped ink is co-extruded with heavy doped ink to serve as a spacer or barrier, and optionally forms a cap that entirely covers the heavy doped ink. A hybrid thermal treatment utilizes a gaseous dopant to simultaneously dope exposed portions of the wafer.
1. A system for fabricating a wafer-based semiconductor device on a substrate, the system comprising:
means for extruding a first dopant bearing paste and a second dopant bearing paste on a surface of the semiconductor substrate such that the first dopant bearing paste forms a first extruded structure on a first surface area of the semiconductor substrate, and such that the second dopant bearing paste forms a second extruded structure on a second surface area of the semiconductor substrate, wherein the first and second surface areas are separated by a third surface area, and wherein the first dopant bearing paste includes a first dopant of a first dopant type, and the second dopant bearing paste includes a second dopant of a second dopant type and
means for heating the semiconductor substrate such that the first dopant diffuses through the first surface area into the semiconductor substrate, thereby forming a first doped region, and such that the second dopant diffuses through the second surface area into the semiconductor substrate, thereby forming a second doped region.
2. The system of claim 1 , further comprising means for removing residual portions of at least one of the first extrusion structure and the second extrusion structure after said heating.
3. The system according to claim 1 , further comprising:
means for depositing a passivation layer on the surface of the semiconductor substrate over the first and second doped regions,
means for removing portions of the passivation layer such that a plurality of contact openings are defined through the passivation layer to each of the first and second surface areas,
means for disposing a conductive contact structure into each of the contact openings, and
means for disposing metal line structures onto an upper surface of the passivation layer such that each metal line structure contacts a group of said contact structures that are disposed over a corresponding one of said first and second doped regions.
4. The system according to claim 1 , wherein said means for extruding comprises an extrusion head that includes a laminated structure comprising a plurality of micro-machined sheets comprising at least one of silicon, glass and polymer materials.
5. The system according to claim 4 , wherein the extrusion head comprises a first sheet defining a plurality of nozzle channels, a second sheet defining a first plenum and a first plurality of feed channels operably disposed to pass said first dopant bearing paste from the first plenum to a first plurality of the nozzle channels, and a third sheet defining a second plenum and a second plurality of feed channels operably disposed to pass said second dopant bearing paste from the second plenum to a second plurality of the nozzle channels.
6. The system according to claim 5 , wherein the first sheet is disposed between the second sheet and the third sheet.
7. The system according to claim 5 , wherein the second sheet is disposed between the first sheet and the third sheet.
8. The system according to claim 5 , further comprising means for passing a third material to a third plurality of the nozzle channels.
9. The system according to claim 8 , wherein at least one of said nozzle channels of the third plurality is disposed between a first associated nozzle channel of the first plurality and a second associated nozzle channel of the second plurality.
10. The system according to claim 5 , wherein at least one of said nozzle channels of the first plurality comprises tapered nozzle walls.
11. A system for fabricating a wafer-based semiconductor device on a substrate, the system comprising:
means for extruding a first dopant bearing material and a second dopant bearing material on a surface of the semiconductor substrate such that the first dopant bearing material forms a first extruded structure on a first surface area of the semiconductor substrate, and such that the second dopant bearing material forms a second extruded structure on a second surface area of the semiconductor substrate, wherein the first and second surface areas are separated by a third surface area, and wherein the first dopant bearing material includes a first dopant of a first dopant type, and the second dopant bearing material includes a second dopant of a second dopant type,
means for heating the semiconductor substrate such that the first dopant diffuses through the first surface area into the semiconductor substrate, thereby forming a first doped region, and such that the second dopant diffuses through the second surface area into the semiconductor substrate, thereby forming a second doped region,
means for depositing a passivation layer on the surface of the semiconductor substrate over the first and second doped regions,
means for laser ablating portions of the passivation layer such that a plurality of contact openings are defined through the passivation layer to each of the first and second surface areas,
means for disposing a conductive contact structure into each of the contact openings, and
means for disposing metal line structures onto an upper surface of the passivation layer such that each metal line structure contacts a group of said contact structures that are disposed over a corresponding one of said first and second doped regions.
12. A system for fabricating a wafer-based semiconductor device on a substrate, the system comprising:
means for extruding a first dopant bearing material and a second dopant bearing material on a surface of the semiconductor substrate such that the first dopant bearing material forms a first extruded structure on a first surface area of the semiconductor substrate, and such that the second dopant bearing material forms a second extruded structure on a second surface area of the semiconductor substrate, wherein the first and second surface areas are separated by a third surface area, and wherein the first dopant bearing material includes a first dopant of a first dopant type, and the second dopant bearing material includes a second dopant of a second dopant type,
means for heating the semiconductor substrate such that the first dopant diffuses through the first surface area into the semiconductor substrate, thereby forming a first doped region, and such that the second dopant diffuses through the second surface area into the semiconductor substrate, thereby forming a second doped region,
means for depositing a passivation layer on the surface of the semiconductor substrate over the first and second doped regions,
means for removing portions of the passivation layer such that a plurality of contact openings are defined through the passivation layer to each of the first and second surface areas,
means for disposing a conductive contact structure into each of the contact openings, and
means for disposing at least one metal line structure onto an upper surface of the passivation layer such that said metal line structure contacts said first doped region by way of said conductive contact structure.