Fine droplet atomizer for liquid precursor vaporization
View Patent ↗The present disclosure relates to an apparatus and a method for forming a droplet aerosol for vaporization and subsequent thin film deposition on a substrate. The apparatus includes a mechanism to control the rate of liquid flow through the apparatus, the mechanism including a piezoelectric actuator to adjust the rate of liquid flow and an atomizing mechanism drawing gas from a compressed gas source such that when the gas source conjoins with the liquid, the liquid is atomized to form droplets suspended in the gas thereby forming a droplet aerosol suitable for subsequent thin film deposition on a substrate. The method includes drawing a gas from a compressed gas source and drawing a liquid from a liquid source. The liquid and gas are conjoined in either a coaxial flow relationship or a radial flow relationship or an angular relationship between radial and coaxial flow wherein the gas engages the liquid to form droplets suitable for vaporization and subsequent thin film deposition on a substrate.
1. An apparatus for atomizing a precursor liquid in a gas to form a droplet aerosol comprising:
a mechanism to control the rate of liquid flow through the apparatus, said mechanism including a piezoelectric actuator to adjust the rate of liquid flow, and an atomizing mechanism drawing a gas from a compressed gas source to atomize the liquid drawn from a liquid source to form droplets suspended in the gas and form a droplet aerosol for vaporization and thin film deposition on a substrate; and
a heater and a temperature sensor for controlling the temperature of said piezoelectric actuator to a specified set point temperature.
2. The apparatus of claim 1 including a radial-flow atomizing head wherein the gas impinges the liquid for producing said droplet aerosol.
3. The apparatus of claim 1 including additionally an axial flow atomizing head wherein the gas and liquid flow are disposed in the same axial direction.
4. The apparatus of claim 1 including additionally an angular flow atomizing head wherein the gas impinges on the liquid at an angle between approximately 0° and 180° with respect to horizontal.