Epitaxial growth systems
View Patent ↗Disclosed is about an epitaxial growth system, including an epitaxial growth reactor chamber, a susceptor including a supporting surface and disposed in the epitaxial growth reactor chamber, and a plurality of wafer fixing elements disposed on the supporting surface. The supporting surface of the susceptor includes a rim, and each of the wafer fixing elements includes a boundary. At least three first heating elements are disposed under the susceptor and arranged in parallel to the supporting surface.
1. An epitaxial growth system, comprising:
an epitaxial growth reactor chamber;
a susceptor disposed in the epitaxial growth reactor chamber, wherein the susceptor includes a top surface and a side surface;
a plurality of wafer fixing elements disposed on the top surface, and each of the wafer fixing elements has a boundary;
a plurality of first heating elements under the susceptor arranged in parallel to the top surface; and
a plurality of second heating elements disposed under the outermost first heating element and no other heating elements disposed within the susceptor, wherein the first and the second heating elements are independently controllable.
2. The system as claimed in claim 1 , further comprising a rotation device connected to a geometry center of the susceptor.
3. The system as claimed in claim 1 , further comprising a plurality of gas input elements disposed in the epitaxial growth reactor chamber for providing process gases during an epitaxy process.
4. The system as claimed in claim 1 , wherein the first and second heating elements are heated by different heating devices, respectively.
5. The system as claimed in claim 1 , wherein the susceptor comprises:
a first sidewall corresponding to the outermost first heating element; and
a second sidewall not corresponding to the outermost first heating element; wherein the first sidewall is thinner than the second sidewall.
6. The system as claimed in claim 1 , wherein an edge part of the susceptor corresponding to an outermost first heating element of the first heating elements is thinner than a part of the susceptor not corresponding to the outermost first heating element.
7. The system as claimed in claim 1 , wherein a second minimum distance between the second heating element and the side surface is greater than or equal to a first minimum distance between the boundary of the outermost wafer fixing element and the side surface; and a difference between the first minimum distance and the second minimum distance is less than or equal to 5 mm.
8. The system as claimed in claim 1 , wherein each of the first heating elements is apart from the top surface with a first distance, and the first distances of the first heating elements are substantially the same.
9. An epitaxial growth system, comprising:
an epitaxial growth reactor chamber;
a susceptor disposed in the epitaxial growth reactor chamber, wherein the susceptor includes a top surface and a side surface;
a plurality of wafer fixing elements disposed on the top surface, and each of the wafer fixing elements having a boundary; and
a plurality of first heating elements being apart from the top surface with a first distance; wherein the first distances of the first heating elements are substantially the same;
a second heating element being apart from the top surface with a second distance less than the first distance; and
a plurality of third heating elements directly under the second heating element, and no other heating elements are disposed within the susceptor, wherein the first, the second and the third heating elements are independently controllable.
10. The system as claimed in claim 9 , wherein a second minimum distance between the second heating element and the side surface is greater than or equal to a first minimum distance between the boundary of the outermost wafer fixing element and the side surface; and a difference between the first minimum distance and the second minimum distance is less than or equal to 5 mm.
11. The system as claimed in claim 9 , further comprising a rotation device connected to a geometry center of the susceptor.
12. The system as claimed in claim 9 , further comprising a plurality of gas input elements disposed in the epitaxial growth reactor chamber for providing process gases during an epitaxy process.
13. The system as claimed in claim 9 , wherein the first and the third heating elements are heated by different heating devices, respectively.
14. The system as claimed in claim 9 , wherein the susceptor comprises:
a first sidewall corresponding to the second heating element; and
a second sidewall not corresponding to the second heating element;
wherein the first sidewall is thinner than the second sidewall.