Reverse block-type insulated gate bipolar transistor manufacturing method
View Patent ↗A reverse block-type insulated gate bipolar transistor (IGBT) manufacturing method that, when manufacturing a reverse block-type IGBT having a separation layer formed along tapered surfaces of a V-shaped groove formed using anisotropic etching, can secure a highly reliable reverse pressure resistance, and suppress a leakage current when reverse biasing. When irradiating with a flash lamp for flash lamp annealing after implantation of ions into a second conductivity type separation layer and second conductivity type collector layer to form the second conductivity type collector layer and second conductivity type separation layer, the strongest portion of radiation energy is focused on a depth position from the upper portion to the central portion of a tapered side edge surface.
1. A reverse block-type insulated gate bipolar transistor manufacturing method, comprising:
forming a MOS gate structure on one main surface of a first conductivity type semiconductor substrate;
forming a second conductivity type collector layer on an other main surface;
forming a second conductivity type separation layer, along a tapered side edge surface formed by etching from either one of the main surfaces to the other main surface, that links the two main surfaces with a layer of the same conductivity type, and is connected to the second conductivity type collector layer of the other main surface; and
forming each of an emitter metal electrode on the MOS gate structure side and a collector metal electrode on the second conductivity type collector layer side,
wherein when irradiating with a laser for a laser annealing after an implantation of ions into the second conductivity type separation layer and second conductivity type collector layer to form the second conductivity type collector layer and second conductivity type separation layer, the focal point is adjusted to a depth position from the upper portion to the central portion of the tapered side edge surface.
2. The reverse block-type insulated gate bipolar transistor manufacturing method according to claim 1 ,
wherein the laser radiation energy density for the laser annealing is a high density of an extent at which the second conductivity type collector layer is not thermally destroyed.
3. The reverse block-type insulated gate bipolar transistor manufacturing method according to claim 1 ,
wherein the laser annealing is carried out separately for the second conductivity type separation layer and second conductivity type collector layer.
4. The reverse block-type insulated gate bipolar transistor manufacturing method according to claim 1 ,
wherein the laser annealing increases the laser radiation energy density by utilizing light reflected from the tapered side edge surface and side edge surface bottom portion.
5. The reverse block-type insulated gate bipolar transistor manufacturing method according to claim 1 ,
wherein an overlap rate at a time of a laser irradiation is increased to an extent at which the second conductivity type collector layer is not destroyed by heat.
6. The reverse block-type insulated gate bipolar transistor manufacturing method according to claim 1 ,
wherein the laser annealing is carried out while the holding temperature of the semiconductor substrate is maintained at a high temperature equal to or less than the melting temperature of the emitter metal electrode.
7. The reverse block-type insulated gate bipolar transistor manufacturing method according to claim 1 ,
wherein the emitter metal electrode is a metal electrode film with aluminum as a main element.
8. The reverse block-type insulated gate bipolar transistor manufacturing method according to claim 6 ,
wherein the holding temperature of the semiconductor substrate is a high temperature of 500° C. or less.