METHOD OF MANUFACTURING PIEZOELECTRIC VIBRATOR, PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC EQUIPMENT AND RADIO-CONTROLLED TIMEPIECE
Provided is method of manufacturing a piezoelectric vibrator, which includes a tuning fork type piezoelectric vibrating reed that includes a pair of vibration arm portions, a package that accommodates the piezoelectric vibrating reed, and a pair of regulation films that is formed along a longitudinal direction of the vibration arm portions corresponding to the pair of vibration arm portions, the piezoelectric vibrator being capable of improving a degree of vacuum in the package by irradiating the regulation films with a laser to evaporate a part of the regulation films. The method having a frequency measurement process of measuring the frequency of the piezoelectric vibrating reed, and a gettering process of evaporating a part of a regulation film of a position corresponding to a front end side of the vibration arm portion when the measured frequency is higher than a permissible range and evaporating a part of the regulation film of a position of a proximal portion side of the vibration arm portion when the measured frequency is lower than the permissible range.
1 . A method of manufacturing a piezoelectric vibrator,
the piezoelectric vibrator including
a tuning fork type piezoelectric vibrating reed that includes a pair of vibration arm portions,
a package that accommodates the piezoelectric vibrating reed, and
a pair of regulation films that is formed along a longitudinal direction of the vibration arm portions corresponding to the pair of vibration arm portions,
the piezoelectric vibrator being capable of improving a degree of vacuum in the package by irradiating the regulation films with laser to evaporate a part of the regulation films,
the method comprising:
a frequency measurement process of measuring the frequency of the piezoelectric vibrating reed; and
a gettering process of evaporating a part of a regulation film of a position corresponding to a front end side of the vibration arm portion when the measured frequency is higher than a permissible range and evaporating a part of the regulation film of a position of a proximal portion side of the vibration arm portion when the measured frequency is lower than the permissible range.
2 . The method of manufacturing the piezoelectric vibrator according to claim 1 , the piezoelectric vibrator further comprising:
a pair of regulation films, which are formed along a longitudinal direction of the vibration arm portions corresponding to each of the pair of vibration arm portions,
wherein, when evaporating a part of the regulation film, the laser is irradiated to symmetrical positions via a center axis of the pair of vibration arm portions in the pair of regulation films to evaporate a part of the regulation film.
3 . A piezoelectric vibrator which is manufactured by the method according to claim 1 .
4 . An oscillator in which the piezoelectric vibrator manufactured by the method according to claim 1 is electrically connected to an integrated circuit as an oscillating element.
5 . An electronic equipment in which the piezoelectric vibrator manufactured by the method according to claim 1 is electrically connected to a measurement portion.
6 . A radio-controlled timepiece in which the piezoelectric vibrator manufactured by the method according to claim 1 is electrically connected to a filter portion.