Piezoelectric vibrator, oscillator, electronic equipment and radio-controlled timepiece, and method of manufacturing piezoelectric vibrator
A piezoelectric vibrator including a base substrate and a lid substrate which are bonded to each other with a cavity formed therebetween; a piezoelectric vibrating reed which has a pair of vibration arm portions extending in parallel, a pair of excitation electrodes that vibrate the pair of vibration arm portions, and a mount electrode that is electrically connected to the pair of excitation electrodes, the piezoelectric vibrating reed being mounted on the base substrate within the cavity via the mount electrode; an insulation film which is formed on the piezoelectric vibrating reed so as to cover the excitation electrodes; and a getter material formed of the metallic material that is formed on any of the base substrate or the lid substrate so as to be arranged within the cavity and improve a degree of vacuum within the cavity by being heated.
1. A method of manufacturing a piezoelectric vibrator with a piezoelectric vibrating reed accommodated therein which has a pair of vibration arm portions extending in parallel, a pair of excitation electrodes that vibrates the pair of vibration arm portions, and a mount electrode that is electrically connected to the pair of excitation electrodes, within a cavity formed between a base substrate and a lid substrate that are bonded to each other, comprising:
an insulation film forming process of forming an insulation film so as to cover the excitation electrodes after producing the piezoelectric vibrating reed;
a getter material forming process of forming a getter material formed of a metallic material, which improves a degree of vacuum in the cavity by being heated, in any one substrate of the base substrate or the lid substrate so as to be arranged within the cavity; and
a bonding process of bonding the base substrate and the lid substrate to each other so as to accommodate the piezoelectric vibrating reed and the getter material within the cavity after mounting the piezoelectric vibrating reed on the base substrate via the mount electrode.
2. The method of manufacturing the piezoelectric vibrator according to claim 1 ,
wherein, during the getter material forming process, two getter materials are formed so as to be oppositely arranged at both sides with the piezoelectric vibrating reed pinched therebetween when the piezoelectric vibrating reed is mounted, and each of the getter materials are formed so as to be extended in parallel to the vibration arm portions at a position adjacent to the insulation film.
3. The method of manufacturing the piezoelectric vibrator according to claim 1 ,
wherein, during the insulation film forming process, the insulation film is formed on an upper surface side and a lower surface side of the piezoelectric vibrating reed, respectively, which face the lid substrate and the base substrate, respectively.
4. The method of manufacturing the piezoelectric vibrator according to claim 3 ,
wherein, during the insulation film forming process, the insulation film is formed over a side surface side of the piezoelectric vibrating reed.
5. The method of manufacturing the piezoelectric vibrator according to claim 1 ,
wherein, upon producing the piezoelectric vibrating reed, the mount electrode and the excitation electrode are formed integrally with an under layer of chromium and a finishing layer of gold, and
wherein, during the insulation film forming process, after removing the finishing layer in the excitation electrode, the insulation film is formed on the under layer using silicon dioxide.
6. A piezoelectric vibrator comprising:
a base substrate and a lid substrate which are bonded to each other with a cavity formed therebetween;
a piezoelectric vibrating reed which has a pair of vibration arm portions extending in parallel, a pair of excitation electrodes that vibrate the pair of vibration arm portions, and a mount electrode that is electrically connected to the pair of excitation electrodes, the piezoelectric vibrating reed being mounted on the base substrate within the cavity via the mount electrode;
an insulation film which is formed on the piezoelectric vibrating reed so as to cover the excitation electrodes; and
a getter material formed of the metallic material that is formed on the base substrate or the lid substrate so as to be arranged within the cavity and improve a degree of vacuum within the cavity by being heated.
7. The piezoelectric vibrator according to claim 6 ,
wherein two getter materials are formed so as to be oppositely arranged at both sides with the mounted piezoelectric vibrating reed pinched therebetween, and
wherein each of the getter materials is formed so as to be extended in parallel to the vibration arm portion in a position adjacent to the insulation film.
8. The piezoelectric vibrator according to claim 6 ,
wherein the insulation film is formed at an upper surface side and a lower surface side of the piezoelectric vibrating reed, respectively, which face the lid substrate and the base substrate, respectively.
9. The piezoelectric vibrator according to claim 8 ,
wherein the insulation film is formed over a side surface side of the piezoelectric vibrating reed.
10. The piezoelectric vibrator according to claim 6 ,
wherein the excitation electrodes are formed of chromium, and
wherein the insulation film is formed of silicon dioxide.
11. An oscillator including the piezoelectric vibrator according to claim 6 which is electrically connected to an integrated circuit as an oscillation element.
12. An electronic equipment including the piezoelectric vibrator according to claim 6 which is electrically connected to a measurement portion.
13. A radio-controlled timepiece having the piezoelectric vibrator described in claim 6 which is electrically connected to a filter portion.