Method of manufacturing piezoelectric vibrator, piezoelectric vibrator, oscillator, electronic equipment and radio-controlled timepiece
Provided is a method of manufacturing a piezoelectric vibrator of the invention, the piezoelectric vibrator including a tuning fork type piezoelectric vibrating reed including a pair of vibration arm portions, a package that accommodates the piezoelectric vibrating reed, and a pair of regulation films that is formed along a longitudinal direction of the vibration arm portions corresponding to each of the pair of vibration arm portions, the piezoelectric vibrator being capable of regulating a degree of vacuum in the package more than a certain level by irradiating the regulation films with a laser to evaporate a part of the regulation films. The method includes a gettering process of irradiating a laser in symmetrical positions via a center axis of the pair of vibration arm portions in the pair of regulation films.
1. A method of manufacturing a piezoelectric vibrator, the method comprising:
providing a tuning fork type piezoelectric vibrating reed including a pair of vibration arm portions;
providing a package that accommodates the piezoelectric vibrating reed; and
forming a pair of regulation films on as substrate within the package in parallel to a longitudinal direction of the vibration arm portions such that the pair of vibration arm portions are positioned between the pair of regulation films,
the piezoelectric vibrator being capable of regulating a degree of vacuum in the package more than a certain level by irradiating the regulation films with laser to evaporate a part of the regulation films,
irradiating, using a laser, the pair of regulation films in symmetrical positions via a center axis of the pair of vibration arm.
2. A piezoelectric vibrator comprising:
a tuning fork type piezoelectric vibrating reed that includes a first vibration arm portion and a second vibration arm portion;
a package that accommodates the piezoelectric vibrating reed; and
a first regulation film formed along a longitudinal direction of the first vibration arm portion along an outside edge of the first vibration arm portion;
a second regulation film formed along a longitudinal direction of the second vibration arm portion along au outside edge of the second vibration arm portion, such that along a direction perpendicular to the longitudinal direction, the first and second vibration arm portions are positioned between first and second regulation films,
the piezoelectric vibrator being capable of improving a degree of vacuum in the package by irradiating the regulation films with a laser to evaporate a part of the regulation films,
wherein an irradiation trace of a laser is formed in symmetrical positions via a center axis of the pair of vibration arm portions in the pair of regulation films.
3. An oscillator comprising a piezoelectric vibrator according to claim 2 that is electrically connected to an integrated circuit as an oscillating element.
4. Electronic equipment comprising a piezoelectric vibrator according to claim 2 that is electrically connected to a measurement portion.
5. A radio-controlled timepiece comprising a piezoelectric vibrator according to claim 2 that is electrically connected to a filter portion.